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dc.contributor.authorCosta Castelló, Ramon
dc.contributor.authorShkel, A.M.
dc.contributor.authorFargas Marquès, A.
dc.date.accessioned2005-11-11T15:31:39Z
dc.date.available2005-11-11T15:31:39Z
dc.date.created2005-09
dc.date.issued2005-09
dc.identifier.urihttp://hdl.handle.net/2117/119
dc.description.abstractMost of MEMS devices are actuated using electrostatic forces. Parallel or lateral plate actuators are the types commonly used. Nevertheless, electrostatic actuation has some limitations due to its non-linear nature. This work presents a methodic overview of the existing techniques applied to the Micro-Electro-Mechanical Systems (MEMS) electrostatic actuation modeling and their implications to the dynamic behavior of the electromechanical system.
dc.language.isoeng
dc.publisherUniversitat Politècnica de Catalunya. Institut d'Organització i Control de Sistemes Industrials
dc.relation.ispartofseriesReports IOC
dc.relation.ispartofseriesIOC-DT-P-2005-18
dc.rightsAttribution-NonCommercial-NoDerivs 2.5 Spain
dc.rights.urihttp://creativecommons.org/licenses/by-nc-nd/2.5/es/
dc.subjectÀrees temàtiques de la UPC::Informàtica::Automàtica i control
dc.titleModelling the electrostatic actuation of MEMS: state of the art 2005.
dc.typeExternal research report
dc.rights.accessOpen Access
local.personalitzacitaciotrue


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