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Modelling the electrostatic actuation of MEMS: state of the art 2005.
dc.contributor.author | Costa Castelló, Ramon |
dc.contributor.author | Shkel, A.M. |
dc.contributor.author | Fargas Marquès, A. |
dc.date.accessioned | 2005-11-11T15:31:39Z |
dc.date.available | 2005-11-11T15:31:39Z |
dc.date.created | 2005-09 |
dc.date.issued | 2005-09 |
dc.identifier.uri | http://hdl.handle.net/2117/119 |
dc.description.abstract | Most of MEMS devices are actuated using electrostatic forces. Parallel or lateral plate actuators are the types commonly used. Nevertheless, electrostatic actuation has some limitations due to its non-linear nature. This work presents a methodic overview of the existing techniques applied to the Micro-Electro-Mechanical Systems (MEMS) electrostatic actuation modeling and their implications to the dynamic behavior of the electromechanical system. |
dc.language.iso | eng |
dc.publisher | Universitat Politècnica de Catalunya. Institut d'Organització i Control de Sistemes Industrials |
dc.relation.ispartofseries | Reports IOC |
dc.relation.ispartofseries | IOC-DT-P-2005-18 |
dc.rights | Attribution-NonCommercial-NoDerivs 2.5 Spain |
dc.rights.uri | http://creativecommons.org/licenses/by-nc-nd/2.5/es/ |
dc.subject | Àrees temàtiques de la UPC::Informàtica::Automàtica i control |
dc.title | Modelling the electrostatic actuation of MEMS: state of the art 2005. |
dc.type | External research report |
dc.rights.access | Open Access |
local.personalitzacitacio | true |
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