Now showing items 1-7 of 7

    • A cmos-mems beol 2-axis lorentz-force magnetometer with device-level offset cancellation 

      Sánchez Chiva, José María; Valle Fraga, Juan José; Fernández, Daniel; Madrenas Boadas, Jordi (2020-10-19)
      Article
      Open Access
      Lorentz-force Microelectromechanical Systems (MEMS) magnetometers have been proposed as a replacement for magnetometers currently used in consumer electronics market. Being MEMS devices, they can be manufactured in the ...
    • A mixed-signal control system for Lorentz-force resonant MEMS magnetometers 

      Sánchez Chiva, José María; Valle Fraga, Juan José; Fernández, Daniel; Madrenas Boadas, Jordi (2019-09-01)
      Article
      Open Access
      This paper presents a mixed-signal closed-loop control system for Lorentz force resonant MEMS magnetometers. The control system contributes to 1) the automatic phase control of the loop, that allows start-up and keeps ...
    • A test setup for the characterization of Lorentz-force MEMS magnetometers 

      Sánchez Chiva, José María; Valle Fraga, Juan José; Fernández Martínez, Daniel; Madrenas Boadas, Jordi (2021-09-13)
      Article
      Open Access
      Lorentz-force MEMS magnetometers are interesting candidates for the replacement of magnetometers in consumer electronics products. Plenty of works in the literature propose MEMS magnetometers, their readout circuits and ...
    • Closed-form equation for natural frequencies of beams under full range of axial loads modeled with a spring-mass system 

      Valle Fraga, Juan José; Fernández Martínez, Daniel; Madrenas Boadas, Jordi (2019-04-01)
      Article
      Open Access
      A new simple closed-form equation that accurately predicts the effect of an arbitrarily large constant axial load, residual stress or temperature shift on the natural frequencies of an uniform single-span beam, with various ...
    • Curvature of BEOL cantilevers in CMOS-MEMS processes 

      Valle Fraga, Juan José; Fernández Martínez, Daniel; Madrenas Boadas, Jordi; Barrachina, Laura (2017-08-01)
      Article
      Open Access
      This paper presents the curvature characterization results of released back-end-of-line 5 µm-wide cantilevers for two different 0.18-µm 1P6M complementary metal-oxide semiconductor microelectromechanical systems processes. ...
    • Design, fabrication, characterization and reliability study of CMOS-MEMS Lorentz-Force magnetometers 

      Valle Fraga, Juan José (Universitat Politècnica de Catalunya, 2022-04-06)
      Doctoral thesis
      Open Access
      Today, the most common form of mass-production semiconductor device fabrication is Complementary Metal-Oxide Semiconductor (CMOS) technology. The dedicated Integrated Circuit (IC) interfaces of commercial sensors are ...
    • Manufacturing Issues of BEOL CMOS-MEMS Devices 

      Valle Fraga, Juan José; Fernández Martínez, Daniel; Gibrat, Olivier; Madrenas Boadas, Jordi (Institute of Electrical and Electronics Engineers (IEEE), 2021-06-07)
      Article
      Open Access
      In this paper we present a comprehensive report on the issues found during the manufacturing of high-yield CMOS-MEMS sensors based on vapor-phase hydrogen fluoride (vapor- HF ) oxide etching. During the study we have ...