In this work, a nonlinear model to predict actuation characteristics in lateral electrostatically-actuated DC-contact MEMS
switches is proposed. In this case a parallel-plate approximation cannot
be applied. The model is based on the equilibrium equation for an elastic
beam. It is demonstrated that the contribution of fringing fields is
essential. The model relies on finite-difference discretization of the
structures, applying boundary conditions and is solved with a Gauss-
Seidel relaxation iteration scheme. Its usefulness is demonstrated in a series
MEMS switch with lateral interdigital electrostatic actuation.
CitationLazaro, A.; Girbau, D.; Pradell, L., Nebot, A. Nonlinear actuation model for lateral electrostatically-actuated DC-contact RF MEMS series switches. MICROWAVE AND OPTICAL TECHNOLOGY LETTERS, 2007, vol. 49, núm. 6, p. 1238-1241.
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