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Nonlinear actuation model for lateral electrostatically-actuated DC-contact RF MEMS series switches.

dc.contributor.authorLázaro Guillén, Antoni
dc.contributor.authorGirbau Sala, David
dc.contributor.authorPradell i Cara, Lluís
dc.contributor.authorNebot Serra, Àlvar
dc.contributor.otherUniversitat Politècnica de Catalunya. Departament de Teoria del Senyal i Comunicacions
dc.date.accessioned2008-03-06T12:29:44Z
dc.date.available2008-03-06T12:29:44Z
dc.date.created2006-10
dc.date.issued2007-06-01
dc.identifier.citationLazaro, A.; Girbau, D.; Pradell, L., Nebot, A. Nonlinear actuation model for lateral electrostatically-actuated DC-contact RF MEMS series switches. MICROWAVE AND OPTICAL TECHNOLOGY LETTERS, 2007, vol. 49, núm. 6, p. 1238-1241.
dc.identifier.issn0895-2477
dc.identifier.urihttp://hdl.handle.net/2117/1779
dc.description.abstractIn this work, a nonlinear model to predict actuation characteristics in lateral electrostatically-actuated DC-contact MEMS switches is proposed. In this case a parallel-plate approximation cannot be applied. The model is based on the equilibrium equation for an elastic beam. It is demonstrated that the contribution of fringing fields is essential. The model relies on finite-difference discretization of the structures, applying boundary conditions and is solved with a Gauss- Seidel relaxation iteration scheme. Its usefulness is demonstrated in a series MEMS switch with lateral interdigital electrostatic actuation.
dc.format.extent1238-1241
dc.language.isoeng
dc.publisherJOHN WILEY & SONS INC
dc.subjectÀrees temàtiques de la UPC::Enginyeria de la telecomunicació::Radiocomunicació i exploració electromagnètica::Circuits de microones, radiofreqüència i ones mil·limètriques
dc.subject.lcshIterative methods (Mathematics)
dc.subject.lcshMicroelectromechanical systems
dc.subject.otherElectrostatic actuators
dc.subject.otherFinite difference methods
dc.subject.otherIterative methods
dc.subject.otherMicroswitches
dc.subject.otherRelaxation theory
dc.subject.otherNonlinear actuation model
dc.subject.otherElectrostatically-actuated DC-contact RF MEMS
dc.subject.otherRF MEMS series switches
dc.subject.otherEquilibrium equation
dc.subject.otherElastic beam
dc.subject.otherFinite-difference discretization
dc.subject.otherGauss-Seidel relaxation iteration scheme
dc.titleNonlinear actuation model for lateral electrostatically-actuated DC-contact RF MEMS series switches.
dc.typeArticle
dc.subject.lemacMètodes iteratius (Matemàtica)
dc.subject.lemacMicroelectromechanical systems
dc.contributor.groupUniversitat Politècnica de Catalunya. RF&MW - Grup de Recerca de sistemes, dispositius i materials de RF i microones
dc.description.peerreviewedPeer Reviewed
dc.rights.accessOpen Access
local.personalitzacitaciotrue


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