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dc.contributor.authorGarin Escriva, Moises
dc.contributor.authorFenollosa Esteve, Roberto
dc.contributor.authorKowalski, Lukasz
dc.contributor.otherUniversitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica
dc.date.accessioned2017-01-17T17:14:53Z
dc.date.available2017-01-17T17:14:53Z
dc.date.issued2016-12-08
dc.identifier.citationGarin, M., Fenollosa, R., Kowalski, L. In situ size sorting in CVD synthesis of Si microspheres. "Scientific reports", 8 Desembre 2016, vol. 6.
dc.identifier.issn2045-2322
dc.identifier.urihttp://hdl.handle.net/2117/99527
dc.description.abstractSilicon microspheres produced in gas-phase by hot-wall CVD offer unique quality in terms of sphericity, surface smoothness, and size. However, the spheres produced are polydisperse in size, which typically range from 0.5¿µm to 5¿µm. In this work we show through experiments and calculations that thermophoretic forces arising from strong temperature gradients inside the reactor volume effectively sort the particles in size along the reactor. These temperature gradients are shown to be produced by a convective gas flow. The results prove that it is possible to select the particle size by collecting them in a particular reactor region, opening new possibilities towards the production by CVD of size-controlled high-quality silicon microspheres.
dc.language.isoeng
dc.publisherMacmillan Publishers
dc.rights.urihttp://creativecommons.org/licenses/by-nc-nd/3.0/es/
dc.subjectÀrees temàtiques de la UPC::Enginyeria electrònica
dc.subject.otherSilicon microspheres
dc.subject.otherCVD
dc.subject.othersize sorting
dc.subject.otherthermophoresis
dc.titleIn situ size sorting in CVD synthesis of Si microspheres
dc.typeArticle
dc.subject.lemacNanotecnologia
dc.subject.lemacDeposició química en fase vapor
dc.subject.lemacSilici -- Aplicacions industrials
dc.contributor.groupUniversitat Politècnica de Catalunya. MNT - Grup de Recerca en Micro i Nanotecnologies
dc.identifier.doi10.1038/srep38719
dc.relation.publisherversionhttp://www.nature.com/articles/srep38719
dc.rights.accessOpen Access
drac.iddocument19334685
dc.description.versionPostprint (author's final draft)
upcommons.citation.authorGarin, M., Fenollosa, R., Kowalski, L.
upcommons.citation.publishedtrue
upcommons.citation.publicationNameScientific reports
upcommons.citation.volume6
upcommons.citation.startingPage38719
dc.identifier.pmid27929055


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