Simultaneous control of dielectric charging and device capacitance for contactless electrostatic MEMS

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Gorreta Mariné, Sergio
Tutor / directorPons Nin, JoanMés informacióMés informacióMés informació
Document typeMaster thesis (pre-Bologna period)
Date2016-09-20
Rights accessRestricted access - author's decision
Abstract
Description
SubjectsElectromechanical decives, Electronic control, Dispositius electromecànics, Control electrònic
DegreeENGINYERIA ELECTRÒNICA (Pla 1992)
URIhttp://hdl.handle.net/2117/97460
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