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dc.contributor.authorLlamas Morote, Marco Antonio
dc.contributor.authorGirbau Sala, David
dc.contributor.authorPradell i Cara, Lluís
dc.contributor.authorLázaro Guillén, Antoni
dc.contributor.authorGiacomozzi, Flavio
dc.contributor.authorColpo, S
dc.contributor.otherUniversitat Politècnica de Catalunya. Departament de Teoria del Senyal i Comunicacions
dc.identifier.citationLlamas, M. [et al.]. Characterization of dynamics in RF-MEMS switches. A: International Conference on RF MEMS and RF Microsystems. "10th International Conference on RF MEMS and RF Microsystems - MEMSWAVE-2009". Trento: 2009, p. 2627-2633.
dc.description.abstractThis paper proposes a new method to measure dynamics and power handling of RF microelectromechanical systems (MEMS) devices based on a mobile membrane. The method uses in-phase/quadrature demodulation of an RF signal proportional to the reflection coefficient of the measured device, which contains information of its mechanical properties, such as actuation and release times and instantaneous position of the mobile membrane. Both one-port (capacitors) and two-port devices (switches and extended tuning-range capacitors) can be measured. Its main advantage is the capability of obtaining information from both magnitude and phase variations of the device reflection coefficient to characterize its dynamics and power handling. It is shown that detecting phase is advantageous in high quality factor capacitors, where the magnitude of the reflection coefficient is nearly constant for any position of the mobile membrane. Open-short-load calibration of the system is provided in order to obtain absolute measurements, which are necessary for power-handling characterization. The performances of the proposed method are demonstrated by comparison to systems based on detection of the magnitude of the reflection coefficient. A MEMS capacitor is characterized in terms of dynamics—actuation and release times, and mechanical resonance frequency—and in terms of power handling—membrane instantaneous position and phase and tuning range variation.
dc.format.extent7 p.
dc.subjectÀrees temàtiques de la UPC::Enginyeria de la telecomunicació
dc.subject.lcshSignal theory (Telecommunication)
dc.subject.lcshMicroelectromechanical systems
dc.titleCharacterization of dynamics in RF-MEMS switches
dc.typeConference report
dc.subject.lemacSenyal, Teoria del (Telecomunicació)
dc.contributor.groupUniversitat Politècnica de Catalunya. RF&MW - Grup de Recerca de sistemes, dispositius i materials de RF i microones
dc.rights.accessOpen Access
dc.description.versionPostprint (published version)
upcommons.citation.authorLlamas, M.; Girbau, D.; Pradell, L.; Lázaro, A.; Giacomozzi, F.; Colpo, S.
upcommons.citation.contributorInternational Conference on RF MEMS and RF Microsystems
upcommons.citation.publicationName10th International Conference on RF MEMS and RF Microsystems - MEMSWAVE-2009

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