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dc.contributor.authorVega Bru, Didac
dc.contributor.authorRodríguez Martínez, Ángel
dc.contributor.authorTodorov Trifonov, Trifon
dc.contributor.authorCalavia, Raul
dc.contributor.authorVilanova, Xavier
dc.contributor.otherUniversitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica
dc.identifier.citationVega, D., Rodriguez, A., Trifonov, T., Calavia, R., Vilanova, X. Compact device for CO2 optical sensing using macroporous silicon photonic crystals. A: Spanish Conference on Electron Devices. "2015 10th Spanish Conference on Electron Devices (CDE 2015): Aranjuez-Madrid, Spain: 11-13 February 2015". Madrid: Institute of Electrical and Electronics Engineers (IEEE), 2015, p. 7087494-1-7087494-3.
dc.description.abstractA photonic crystal based on a macroporous silicon structure has been fabricated and successfully used for the detection of carbon dioxide. In this paper, the device and the measurement results are presented. The sensing device here described uses an optical approach to the detection of the gas. The use of a photonic crystal allows creating a compact device working in the medium infrared spectral range. A 700 nm square lattice macroporous structure was fabricated by electrochemical etching, creating a photonic gap centered at the 4.2 µm, a CO2 absorption line. The obtained results rely only on the absorption spectra measurement.
dc.publisherInstitute of Electrical and Electronics Engineers (IEEE)
dc.subjectÀrees temàtiques de la UPC::Enginyeria electrònica
dc.subject.lcshCarbon dioxide
dc.subject.otherchemical sensors
dc.subject.otherelectrochemical etching
dc.subject.othergas sensors
dc.subject.othermacroporous silicon
dc.titleCompact device for CO2 optical sensing using macroporous silicon photonic crystals
dc.typeConference report
dc.subject.lemacAnhídrid carbònic
dc.subject.lemacGasos -- Mesurament
dc.subject.lemacAnhídrid carbònic -- Mesurament
dc.contributor.groupUniversitat Politècnica de Catalunya. MNT - Grup de Recerca en Micro i Nanotecnologies
dc.rights.accessOpen Access
dc.description.versionPostprint (published version)
local.citation.authorVega, D.; Rodriguez, A.; Trifonov, T.; Calavia, R.; Vilanova, X.
local.citation.contributorSpanish Conference on Electron Devices
local.citation.publicationName2015 10th Spanish Conference on Electron Devices (CDE 2015): Aranjuez-Madrid, Spain: 11-13 February 2015

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