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Compact device for CO2 optical sensing using macroporous silicon photonic crystals

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10.1109/CDE.2015.7087494
 
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Vega Bru, DidacMés informació
Rodríguez Martínez, ÁngelMés informacióMés informacióMés informació
Todorov Trifonov, TrifonMés informacióMés informacióMés informació
Calavia, Raul
Vilanova, Xavier
Document typeConference report
Defense date2015
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
Rights accessOpen Access
Attribution-NonCommercial-NoDerivs 3.0 Spain
Except where otherwise noted, content on this work is licensed under a Creative Commons license : Attribution-NonCommercial-NoDerivs 3.0 Spain
Abstract
A photonic crystal based on a macroporous silicon structure has been fabricated and successfully used for the detection of carbon dioxide. In this paper, the device and the measurement results are presented. The sensing device here described uses an optical approach to the detection of the gas. The use of a photonic crystal allows creating a compact device working in the medium infrared spectral range. A 700 nm square lattice macroporous structure was fabricated by electrochemical etching, creating a photonic gap centered at the 4.2 µm, a CO2 absorption line. The obtained results rely only on the absorption spectra measurement.
CitationVega, D., Rodriguez, A., Trifonov, T., Calavia, R., Vilanova, X. Compact device for CO2 optical sensing using macroporous silicon photonic crystals. A: Spanish Conference on Electron Devices. "2015 10th Spanish Conference on Electron Devices (CDE 2015): Aranjuez-Madrid, Spain: 11-13 February 2015". Madrid: Institute of Electrical and Electronics Engineers (IEEE), 2015, p. 7087494-1-7087494-3. 
URIhttp://hdl.handle.net/2117/85024
DOI10.1109/CDE.2015.7087494
ISBN9781479981090
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  • MNT - Grup de Recerca en Micro i Nanotecnologies - Ponències/Comunicacions de congressos [141]
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