Compact device for CO2 optical sensing using macroporous silicon photonic crystals

Cita com:
hdl:2117/85024
Document typeConference report
Defense date2015
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
Rights accessOpen Access
This work is protected by the corresponding intellectual and industrial property rights.
Except where otherwise noted, its contents are licensed under a Creative Commons license
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Attribution-NonCommercial-NoDerivs 3.0 Spain
Abstract
A photonic crystal based on a macroporous silicon structure has been fabricated and successfully used for the detection of carbon dioxide. In this paper, the device and the measurement results are presented. The sensing device here described uses an optical approach to the detection of the gas. The use of a photonic crystal allows creating a compact device working in the medium infrared spectral range. A 700 nm square lattice macroporous structure was fabricated by electrochemical etching, creating a photonic gap centered at the 4.2 µm, a CO2 absorption line. The obtained results rely only on the absorption spectra measurement.
CitationVega, D., Rodriguez, A., Trifonov, T., Calavia, R., Vilanova, X. Compact device for CO2 optical sensing using macroporous silicon photonic crystals. A: Spanish Conference on Electron Devices. "2015 10th Spanish Conference on Electron Devices (CDE 2015): Aranjuez-Madrid, Spain: 11-13 February 2015". Madrid: Institute of Electrical and Electronics Engineers (IEEE), 2015, p. 7087494-1-7087494-3.
ISBN9781479981090
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