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dc.contributor.authorGorreta Mariné, Sergio
dc.contributor.authorPons Nin, Joan
dc.contributor.authorDomínguez Pumar, Manuel
dc.contributor.otherUniversitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica
dc.date.accessioned2016-03-18T17:07:23Z
dc.date.available2016-03-18T17:07:23Z
dc.date.issued2015-12
dc.identifier.citationGorreta, S., Pons, J., Dominguez, M. Simultaneous control of dielectric charge and device capacitance in electrostatic MEMS. "Journal of microelectromechanical systems", Desembre 2015, vol. 24, núm. 6, p. 1684-1686.
dc.identifier.issn1057-7157
dc.identifier.urihttp://hdl.handle.net/2117/84744
dc.description.abstractThis letter presents a double closed loop for simultaneously controlling the net dielectric charge and the device capacitance in contactless electrostatic MEMS devices. The first loop controls the net charge trapped in the dielectric layer by continuously monitoring the horizontal displacement of the C–V characteristic and applying bipolar actuation voltages to keep such net charge at the target value. The second loop adapts the actuation voltages so that the measured capacitance matches a desired value while maintaining the primary control of charge
dc.format.extent3 p.
dc.language.isoeng
dc.subjectÀrees temàtiques de la UPC::Enginyeria electrònica
dc.subject.lcshElectric engineering
dc.subject.otherDielectric charging
dc.subject.otherMEMS
dc.subject.othercharge control
dc.subject.otherpositioners
dc.subject.othervaractors
dc.titleSimultaneous control of dielectric charge and device capacitance in electrostatic MEMS
dc.typeArticle
dc.subject.lemacEnginyeria elèctrica
dc.contributor.groupUniversitat Politècnica de Catalunya. MNT - Grup de Recerca en Micro i Nanotecnologies
dc.identifier.doi10.1109/JMEMS.2015.2493581
dc.rights.accessOpen Access
local.identifier.drac17506060
dc.description.versionPostprint (author's final draft)
local.citation.authorGorreta, S.; Pons, J.; Dominguez, M.
local.citation.publicationNameJournal of microelectromechanical systems
local.citation.volume24
local.citation.number6
local.citation.startingPage1684
local.citation.endingPage1686


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