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dc.contributor.authorRicart Campos, Jordi
dc.contributor.authorPons Nin, Joan
dc.contributor.authorGorreta Mariné, Sergio
dc.contributor.authorDomínguez Pumar, Manuel
dc.contributor.otherUniversitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica
dc.identifier.citationRicart, J. [et al.]. Digital resonance for MEMS. A: Spanish Conference on Electronics Devices. "7th Spanish Conference on Electronic Devices". Santiago de Compostela: IEEE Press. Institute of Electrical and Electronics Engineers, 2009, p. 312-315.
dc.description.abstractThis work shows the application of Pulsed Digital Oscillators to the detection of physical changes in MEMS devices that cause small shifts in their resonance frequencies. Such devices can be used as resonators in several sensor applications. According to this, a case study using a PDO structure to measure small concentrations of volatile organic gas compounds (VOC’s) introduced here. The MEMS devices used are cantilevers with a thin layer of polymer sensitive to the VOC concentration. Such devices have been simulated with the Coventor software to see the influence of the polymer layers on their mechanical responses. Finally, experimental measurements with various VOCs have been done, and results extracted from two PDO system sources, digital and analog, have been analyzed and compared.
dc.format.extent4 p.
dc.publisherIEEE Press. Institute of Electrical and Electronics Engineers
dc.subjectÀrees temàtiques de la UPC::Enginyeria electrònica
dc.subject.lcshMicroelectromechanical systems.
dc.titleDigital resonance for MEMS
dc.typeConference report
dc.contributor.groupUniversitat Politècnica de Catalunya. MNT - Grup de Recerca en Micro i Nanotecnologies
dc.description.peerreviewedPeer Reviewed
dc.rights.accessOpen Access
dc.description.versionPostprint (published version)
upcommons.citation.authorRicart, J.; Pons, J.; Gorreta, S.; Dominguez, M.
upcommons.citation.contributorSpanish Conference on Electronics Devices
upcommons.citation.pubplaceSantiago de Compostela
upcommons.citation.publicationName7th Spanish Conference on Electronic Devices

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