Analysis of GaAs-Ti thin films deposited by sputtering onto c-Si and GaAs

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Silvestre Bergés, SantiagoMés informacióMés informació
Puigdollers i González, JoaquimMés informacióMés informació
Boronat, A.
Castañer Muñoz, Luis MaríaMés informacióMés informació
Document typeConference lecture
Date issued2009-02-11
PublisherIEEE Press. Institute of Electrical and Electronics Engineers
Rights accessOpen Access
Abstract
CitationSilvestre, S. [et al.]. Analysis of GaAs-Ti thin films deposited by sputtering onto c-Si and GaAs. A: 7th Spanish Conference on Electronics Devices. "7th Spanish Conference on Electronic Devices". Santiago de Compostela: IEEE Press. Institute of Electrical and Electronics Engineers, 2009, p. 5-7. 
URIhttp://hdl.handle.net/2117/6639
DLIEEE
ISBN978-1-4244-2839-7
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