Analysis of GaAs-Ti thin films deposited by sputtering onto c-Si and GaAs

Thumbnail
View/Open
Silvestre Bergés, SantiagoMés informacióMés informacióMés informació
Puigdollers i González, JoaquimMés informacióMés informacióMés informació
Boronat, A.
Castañer Muñoz, Luis MaríaMés informacióMés informació
Document typeConference lecture
Defense date2009-02-11
PublisherIEEE Press. Institute of Electrical and Electronics Engineers
Rights accessOpen Access
All rights reserved. This work is protected by the corresponding intellectual and industrial property rights. Without prejudice to any existing legal exemptions, reproduction, distribution, public communication or transformation of this work are prohibited without permission of the copyright holder
Abstract
CitationSilvestre, S. [et al.]. Analysis of GaAs-Ti thin films deposited by sputtering onto c-Si and GaAs. A: 7th Spanish Conference on Electronics Devices. "7th Spanish Conference on Electronic Devices". Santiago de Compostela: IEEE Press. Institute of Electrical and Electronics Engineers, 2009, p. 5-7. 
URIhttp://hdl.handle.net/2117/6639
DLIEEE
ISBN978-1-4244-2839-7
Collections

FilesDescriptionSizeFormatView
AnalysisGaAs.pdf284,6KbPDFView/Open