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Patterning of WOx, VOx, and MoOx thin-films with picosecond and nanosecond laser sources
dc.contributor.author | Muñoz García, Cristina |
dc.contributor.author | Canteli, David |
dc.contributor.author | Lauzurica, Sara |
dc.contributor.author | Morales Furio, Miguel |
dc.contributor.author | Molpeceres Alvarez, Carlos |
dc.contributor.author | Ros Costals, Eloi |
dc.contributor.author | Ortega Villasclaras, Pablo Rafael |
dc.contributor.author | López González, Juan Miguel |
dc.contributor.author | Voz Sánchez, Cristóbal |
dc.contributor.other | Universitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica |
dc.date.accessioned | 2023-03-15T09:01:47Z |
dc.date.available | 2023-03-15T09:01:47Z |
dc.date.issued | 2022 |
dc.identifier.citation | Muñoz, C. [et al.]. Patterning of WOx, VOx, and MoOx thin-films with picosecond and nanosecond laser sources. A: CIRP Conference on Photonic Technologies. "12th CIRP Conference on Photonic Technologies [LANE 2022]: Fürth, Germany: September 4-8, 2022: proceedings". Elsevier, 2022, p. 605-608. ISBN 2212-8271. DOI 10.1016/j.procir.2022.08.160. |
dc.identifier.isbn | 2212-8271 |
dc.identifier.uri | http://hdl.handle.net/2117/384980 |
dc.description | © 2022 Elsevier. This manuscript version is made available under the CC-BY-NC-ND 4.0 license http://creativecommons.org/licenses/by-nc-nd/4.0/ |
dc.description.abstract | Transition metal oxide (TMOs) layers have interesting properties as selective contacts, i.e., hole or electron transport layers for novel semiconductor devices. Especially, oxides of molybdenum (MoO3), vanadium (V2O5), and tungsten (WO3) show good bahaviour acting as front hole-selective contacts for n-type crystalline-silicon heterojunction solar cells. Laser scribing has been widely used for thin-film ablation and seems the appropriate technology for device manufacturing with such non-conventional materials. In this work, we study the laser scribing of non-stoichiometric evaporated WOx, VOx, and MoOx films with three different wavelengths (1064, 532, and 355 nm) with pulse duration in the nanosecond and picosecond regimes. The selection of the proper laser source allows a wide parametric window, with complete removal of the TMO films and no alteration of the silicon substrate. The results on the isolation of diodes and their electrical characteristics show the quality of the laser scribing processes. |
dc.description.sponsorship | Partial financial support has been provided by the Spanish Ministry of Science and Innovation under the projects CHENOC (ENE2016–78933-C4–1-R and ENE2016– 78933-C4–4-R) and SCALED (PID2019–109215RB-C41 and PID2019–109215RB-C44). |
dc.format.extent | 4 p. |
dc.language.iso | eng |
dc.publisher | Elsevier |
dc.rights | ©2022. Elsevier |
dc.rights | Attribution-NonCommercial-NoDerivatives 4.0 International |
dc.rights.uri | https://creativecommons.org/licenses/by-nc-nd/4.0/ |
dc.subject | Àrees temàtiques de la UPC::Energies::Energia solar fotovoltaica::Cèl·lules solars |
dc.subject | Àrees temàtiques de la UPC::Energies::Energia solar fotovoltaica |
dc.subject.lcsh | Solar cells |
dc.subject.lcsh | Photovoltaic power generation |
dc.subject.other | Fluence threshold |
dc.subject.other | Hole transport layer |
dc.subject.other | Laser ablation |
dc.subject.other | Selective contacts |
dc.subject.other | Silicon solar cells |
dc.subject.other | Transition metal oxides (TMO) |
dc.subject.other | Electron transport properties |
dc.subject.other | Heterojunctions |
dc.subject.other | Hole mobility |
dc.subject.other | Laser ablation |
dc.subject.other | Molybdenum oxide |
dc.subject.other | Semiconductor lasers |
dc.subject.other | Silicon solar cells |
dc.subject.other | Thin films |
dc.subject.other | Transition metals |
dc.subject.other | Tungsten compounds |
dc.subject.other | Vanadium pentoxide |
dc.subject.other | Fluence thresholds |
dc.subject.other | Hole transport layers |
dc.subject.other | Laser scribing |
dc.subject.other | Laser sources |
dc.subject.other | Lasers ablations |
dc.subject.other | Picosecond laser |
dc.subject.other | Selective contacts |
dc.subject.other | Thin-films |
dc.subject.other | Transition metal oxide |
dc.subject.other | Transition-metal oxides |
dc.subject.other | Transition metal oxides |
dc.title | Patterning of WOx, VOx, and MoOx thin-films with picosecond and nanosecond laser sources |
dc.type | Conference report |
dc.subject.lemac | Cèl·lules solars |
dc.subject.lemac | Energia solar fotovoltaica |
dc.contributor.group | Universitat Politècnica de Catalunya. MNT-Solar - Grup de Micro i Nano Tecnologies per Energia Solar |
dc.identifier.doi | 10.1016/j.procir.2022.08.160 |
dc.description.peerreviewed | Peer Reviewed |
dc.relation.publisherversion | https://www.sciencedirect.com/science/article/pii/S2212827122010514 |
dc.rights.access | Open Access |
local.identifier.drac | 34988322 |
dc.description.version | Postprint (published version) |
dc.relation.projectid | info:eu-repo/grantAgreement/MICINN/1PE/ENE2016-78933-C4-1-R |
local.citation.author | Muñoz, C.; Canteli, D.; Lauzurica, S.; Morales, M.; Molpeceres, C.; Ros, E.; Ortega, P.; Lopez-Gonzalez, Juan M.; Voz, C. |
local.citation.contributor | CIRP Conference on Photonic Technologies |
local.citation.publicationName | 12th CIRP Conference on Photonic Technologies [LANE 2022]: Fürth, Germany: September 4-8, 2022: proceedings |
local.citation.startingPage | 605 |
local.citation.endingPage | 608 |