An equivalent model for lateral modes on the H2 response of bulk acoustic wave resonators
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hdl:2117/344842
Document typeConference report
Defense date2020
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
Rights accessRestricted access - publisher's policy
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Abstract
An equivalent circuital model is proposed for the lateral modes of a BAW resonator. It is based in the Mason model, adding a dispersive a transmission line to model the Lamb waves along the lateral dimensions of the resonator. The lateral perturbation of the longitudinal strain is added into the nonlinear constitutive relations. Validation of the model is performed with H2 measurements of Type I rectangular SMR devices.
CitationUdaondo, C. [et al.]. An equivalent model for lateral modes on the H2 response of bulk acoustic wave resonators. A: IEEE International Ultrasonics Symposium. "Proceedings of the 2020 IEEE International Ultrasonics Symposium (IUS)". Institute of Electrical and Electronics Engineers (IEEE), 2020, p. 1-4. ISBN 978-1-7281-5448-0. DOI 10.1109/IUS46767.2020.9251801.
ISBN978-1-7281-5448-0
Publisher versionhttps://ieeexplore.ieee.org/document/9251801
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