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dc.contributor.authorJärvinen, Hannu
dc.contributor.authorKassamakov, I.
dc.contributor.authorViitala, T.
dc.contributor.authorBermúdez Porras, Carlos
dc.contributor.authorArtigas Pursals, Roger
dc.contributor.authorMartínez Marin, Pol
dc.contributor.otherUniversitat Politècnica de Catalunya. Centre de Desenvolupament de Sensors, Instrumentació i Sistemes
dc.date.accessioned2020-11-16T13:31:27Z
dc.date.available2020-11-16T13:31:27Z
dc.date.issued2020-09-01
dc.identifier.citationJärvinen, H. [et al.]. Step height standards based on self-assembly for 3D metrology of biological samples. "Measurement science and technology", 1 Setembre 2020, vol. 31, núm. 9, p. 94008-1-94008-6.
dc.identifier.issn0957-0233
dc.identifier.urihttp://hdl.handle.net/2117/332256
dc.description.abstractModern microscopes and profilometers such as the coherence scanning interferometer (CSI) approach sub-nm precision in height measurements. Transfer standards at all measured size scales are needed to guarantee traceability at any scale and utilize the full potential of these instruments, but transfer standards with similar characteristics upon reflection to those of the measured samples are preferred. This is currently not the case for samples featuring dimensions of less than 10 nm and for biosamples with different optical charasteristics to silicon, silica or metals. To address the need for 3D images of biosamples with traceable dimensions, we introduce a transfer standard with dimensions guaranteed by natural self-assembly and a material that is optically similar to that in typical biosamples. We test the functionality of these transfer standards by first calibrating them using an atomic force microscope (AFM) and then using them to calibrate a CSI. We investigate whether a good enough calibration accuracy can be reached to enable a useful calibration of the CSI system. The result is that the calibration uncertainty is only marginally increased due to the sample
dc.language.isoeng
dc.rightsAttribution 4.0 International
dc.rights.urihttps://creativecommons.org/licenses/by/4.0/
dc.subjectÀrees temàtiques de la UPC::Enginyeria electrònica::Instrumentació i mesura
dc.subjectÀrees temàtiques de la UPC::Ciències de la visió::Òptica física
dc.subject.lcshOptical measurements
dc.subject.lcshMetrology
dc.subject.lcshCalibration
dc.subject.otherNanometrology
dc.subject.otherTransfer standard
dc.subject.otherCalibration
dc.subject.otherCSI
dc.subject.otherSWLI
dc.subject.otherAFM
dc.subject.otherTraceability
dc.titleStep height standards based on self-assembly for 3D metrology of biological samples
dc.typeArticle
dc.subject.lemacÒptica -- Mesuraments
dc.subject.lemacMetrologia
dc.subject.lemacCalibratge
dc.contributor.groupUniversitat Politècnica de Catalunya. GREO - Grup de Recerca en Enginyeria Òptica
dc.identifier.doi10.1088/1361-6501/ab8c6a
dc.description.peerreviewedPeer Reviewed
dc.relation.publisherversionhttps://iopscience.iop.org/article/10.1088/1361-6501/ab8c6a
dc.rights.accessOpen Access
local.identifier.drac29313117
dc.description.versionPostprint (published version)
local.citation.authorJärvinen, H.; Kassamakov, I.; Viitala, T.; Bermúdez, C.; Artigas, R.; Martínez, P.
local.citation.publicationNameMeasurement science and technology
local.citation.volume31
local.citation.number9
local.citation.startingPage094008-1
local.citation.endingPage094008-6


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Except where otherwise noted, content on this work is licensed under a Creative Commons license : Attribution 4.0 Generic