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dc.contributor.authorGorreta Mariné, Sergio
dc.contributor.authorPons Nin, Joan
dc.contributor.authorBlokhina, Elena
dc.contributor.authorDomínguez Pumar, Manuel
dc.contributor.otherUniversitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica
dc.date.accessioned2015-05-08T16:47:47Z
dc.date.available2015-05-08T16:47:47Z
dc.date.created2015-04-01
dc.date.issued2015-04-01
dc.identifier.citationGorreta, S. [et al.]. A Second-order delta-sigma control of dielectric charge for contactless capacitive MEMS. "Journal of microelectromechanical systems", 01 Abril 2015, vol. 24, núm. 2, p. 259-261.
dc.identifier.issn1057-7157
dc.identifier.urihttp://hdl.handle.net/2117/27857
dc.description.abstractThis letter introduces a new second-order delta-sigma method for controlling the dielectric charge in contactless capacitive microelectromechanical systems. This method improves the one previously proposed by the authors, providing second-order quantization noise shaping and avoiding the plateaus typical of first-order strategies. The feasibility and the features of the new method are demonstrated both experimentally and through simulations.
dc.format.extent3 p.
dc.language.isoeng
dc.rightsAttribution-NonCommercial-NoDerivs 3.0 Spain
dc.rights.urihttp://creativecommons.org/licenses/by-nc-nd/3.0/es/
dc.subjectÀrees temàtiques de la UPC::Enginyeria electrònica
dc.subject.lcshMicroelectromechanical systems.
dc.subject.otherDielectric charging control
dc.subject.otherMEMS reliability
dc.titleA Second-order delta-sigma control of dielectric charge for contactless capacitive MEMS
dc.typeArticle
dc.subject.lemacSistemes microelectromecànics
dc.contributor.groupUniversitat Politècnica de Catalunya. MNT - Grup de Recerca en Micro i Nanotecnologies
dc.identifier.doi10.1109/JMEMS.2015.2402394
dc.rights.accessOpen Access
local.identifier.drac15620755
dc.description.versionPostprint (published version)
local.citation.authorGorreta, S.; Pons, J.; Blokhina, E.; Dominguez, M.
local.citation.publicationNameJournal of microelectromechanical systems
local.citation.volume24
local.citation.number2
local.citation.startingPage259
local.citation.endingPage261


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Attribution-NonCommercial-NoDerivs 3.0 Spain
Except where otherwise noted, content on this work is licensed under a Creative Commons license : Attribution-NonCommercial-NoDerivs 3.0 Spain