A Second-order delta-sigma control of dielectric charge for contactless capacitive MEMS
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This letter introduces a new second-order delta-sigma method for controlling the dielectric charge in contactless capacitive microelectromechanical systems. This method improves the one previously proposed by the authors, providing second-order quantization noise shaping and avoiding the plateaus typical of first-order strategies. The feasibility and the features of the new method are demonstrated both experimentally and through simulations.
CitationGorreta, S. [et al.]. A Second-order delta-sigma control of dielectric charge for contactless capacitive MEMS. "Journal of microelectromechanical systems", 01 Abril 2015, vol. 24, núm. 2, p. 259-261.