A Second-order delta-sigma control of dielectric charge for contactless capacitive MEMS

Abstract

This letter introduces a new second-order delta-sigma method for controlling the dielectric charge in contactless capacitive microelectromechanical systems. This method improves the one previously proposed by the authors, providing second-order quantization noise shaping and avoiding the plateaus typical of first-order strategies. The feasibility and the features of the new method are demonstrated both experimentally and through simulations.