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dc.contributor.authorDomínguez Pumar, Manuel
dc.contributor.authorGorreta Mariné, Sergio
dc.contributor.authorPons Nin, Joan
dc.contributor.authorBlokhina, Elena
dc.contributor.authorGiounanlis, Panonios
dc.contributor.authorFeely, Orla
dc.contributor.otherUniversitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica
dc.identifier.citationDominguez, M. [et al.]. Real-time characterization of dielectric charging in contactless capacitive MEMS. "Analog integrated circuits and signal processing", 01 Març 2015, vol. 82, núm. 3, p. 559-569.
dc.description.abstractThis paper presents a new method to characterize the dynamics of the charge trapped in the dielectric layer of contactless microelectromechanical systems. For sampled-time systems, this allows knowing the state of the net charge at each sampling time without distorting the measurement. This approach allows one to model the expected behaviour of dielectric charging as a response to a sigma-delta control of charge. The goodness of the proposed approach is obtained by matching the experimentally obtained closed loop response with the one predicted using the proposed characterization method. The characterization method also provides a criterion to avoid nonlinear effects, such as fractal-like behaviour, in charge control.
dc.format.extent11 p.
dc.subjectÀrees temàtiques de la UPC::Enginyeria electrònica::Microelectrònica
dc.subjectÀrees temàtiques de la UPC::Enginyeria de la telecomunicació::Processament del senyal::Adquisició i detecció del senyal
dc.subject.otherMEMS reliability
dc.subject.otherDielectric charge dynamics
dc.subject.otherDielectric charge characterization
dc.subject.otherDielectric charge control
dc.titleReal-time characterization of dielectric charging in contactless capacitive MEMS
dc.contributor.groupUniversitat Politècnica de Catalunya. MNT - Grup de Recerca en Micro i Nanotecnologies
dc.description.peerreviewedPeer Reviewed
dc.rights.accessOpen Access
dc.description.versionPostprint (author’s final draft)
local.citation.authorDominguez, M.; Gorreta, S.; Pons, J.; Blokhina, E.; Giounanlis, P.; Feely, O.
local.citation.publicationNameAnalog integrated circuits and signal processing

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