Towards atomic force microscopy measurements using differential self-mixing interferometry
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hdl:2117/26264
Document typeConference lecture
Defense date2014
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
Rights accessRestricted access - publisher's policy
This work is protected by the corresponding intellectual and industrial property rights.
Except where otherwise noted, its contents are licensed under a Creative Commons license
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Attribution-NonCommercial-NoDerivs 3.0 Spain
Abstract
In this paper, we explore the possibility of joining
two measurement techniques that share a similar time frame
and that are interested in describing the properties of materials
through the study of the micro and nanometric scale. Atomic
force microscopy (AFM) is a well established method capable
of measuring different material properties by examining the
deflection of a micro-cantilever caused by the sample surface force
interactions. The cantilever deflection is typically estimated using
the optical lever technique which requires a careful alignment of
the laser beam and the cantilever. To reduce such problem, we
propose the use of differential self-mixing interferometry (DSMI).
A test to prove the feasibility of applying the DSMI on an
AFM cantilever will be discussed as well as the problems found
during the measurement. Preliminary results show that DSMI is
capable of following up cantilever sinusoidal displacements with
amplitudes in the range of 200 and 100nm which can usually be
found in AFM non-contact and taping modes.
CitationAzcona, F.; Royo, S.; Jha, A. Towards atomic force microscopy measurements using differential self-mixing interferometry. A: Annual IEEE Conference on Sensors. "The 13th IEEE SENSORS Conference Proceedings". València: Institute of Electrical and Electronics Engineers (IEEE), 2014, p. 766-770.
ISBN978-1-4799-0162-3
Publisher versionhttp://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=6985112
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