Show simple item record

dc.contributor.authorMolinero Giles, David
dc.contributor.authorComulada Simpson, Ricard
dc.contributor.authorCastañer Muñoz, Luis María
dc.contributor.otherUniversitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica
dc.identifier.citationMolinero, D.; Comulada, R.; Castañer, L. Dielectric charge measurements in capacitive microelectromechanical switches. Applied Physics Letters, 2006, vol. 89, 103506.
dc.description.abstractMeasurements of transient currents from the discharge of microelectromechanical capacitive switches after charging the dielectric with an ion gun are reported. It is shown that both the charge sign and the charge amount can be independently measured and that the values can be related to the pull-in shift as measured from C-V characteristics. Several capacitive switches of different sizes were fabricated and subjected to charging and discharging experiments. The analysis of the transients shows that several time constants are governing the charge dynamics, one of them is related to the resistivity-permittivity product of the dielectric.
dc.publisherAmerican Institute of Physics
dc.subjectÀrees temàtiques de la UPC::Enginyeria electrònica::Microelectrònica
dc.subject.lcshMicroelectromechanical systems
dc.subject.lcshElectric discharges
dc.subject.otherCapacitive microelectromechanical switches
dc.subject.otherC-V characteristics
dc.subject.otherCharge dynamics
dc.subject.otherDielectric charge measurements
dc.subject.otherDischarges (electric)
dc.subject.otherElectrical resistivity
dc.subject.otherIon gun
dc.subject.otherPull-in shift
dc.subject.otherResistivity-permittivity product
dc.subject.otherTime constants
dc.subject.otherTransient currents
dc.titleDielectric charge measurements in capacitive microelectromechanical switches
dc.subject.lemacSistemes microelectromecànics
dc.subject.lemacDescàrregues elèctriques
dc.contributor.groupUniversitat Politècnica de Catalunya. MNT - Grup de Recerca en Micro i Nanotecnologies
dc.description.peerreviewedPeer Reviewed
dc.rights.accessRestricted access - publisher's policy

Files in this item


This item appears in the following Collection(s)

Show simple item record

All rights reserved. This work is protected by the corresponding intellectual and industrial property rights. Without prejudice to any existing legal exemptions, reproduction, distribution, public communication or transformation of this work are prohibited without permission of the copyright holder