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dc.contributor.authorPérez Marín, A. P.
dc.contributor.authorLopeandía, A. F.
dc.contributor.authorAbad, L.
dc.contributor.authorFerrando-Villaba, P.
dc.contributor.authorLópez Martínez, Antonio Miguel
dc.contributor.authorGarcía, G.
dc.contributor.authorMuñoz Pascual, F.X.
dc.contributor.authorRodriguez Viejo, J.
dc.contributor.otherUniversitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica
dc.date.accessioned2014-05-13T11:56:30Z
dc.date.available2014-05-13T11:56:30Z
dc.date.created2014-03-23
dc.date.issued2014-03-23
dc.identifier.citationPérez, A. [et al.]. Micropower thermoelectric generator from thin Si membranes. "Nano Energy", 23 Març 2014, vol. 4, p. 73-80.
dc.identifier.issn2211-2855
dc.identifier.urihttp://hdl.handle.net/2117/22963
dc.description.abstractWe report the development of a Si-based micro thermogenerator build from silicon-on-insulator by using standard CMOS processing. Ultrathin single-crystalline Si membranes, 100 nm in thickness, with embedded n and p-type doped regions electrically connected in series and thermally in parallel, are active elements of the thermoelectric device that generate thermopower under various thermal gradients. This proof-of-concept device produces an output power density of 4.5 µW/cm2, under a temperature difference of 5 K, opening the way to envisage integration as wearable thermoelectrics for body energy scavenging.
dc.format.extent8 p.
dc.language.isoeng
dc.subjectÀrees temàtiques de la UPC::Energies::Termoenergètica
dc.subject.lcshMetal oxide semiconductors, Complementary
dc.subject.lcshMembranes (Technology)
dc.subject.otherThermogenerator
dc.subject.otherCMOS
dc.subject.otherThermoelectric
dc.subject.otherLow-dimensional Si
dc.subject.otherPlanar thermoelectric generator
dc.subject.otherPower output
dc.subject.otherSi membrane
dc.titleMicropower thermoelectric generator from thin Si membranes
dc.typeArticle
dc.subject.lemacSilici -- Propietats elèctriques
dc.subject.lemacElectrotècnia
dc.subject.lemacMicroelectrònica
dc.contributor.groupUniversitat Politècnica de Catalunya. INSIDE - Innovació en Sistemes per al Disseny i la Formació a l'Enginyeria
dc.identifier.doi10.1016/j.nanoen.2013.12.007
dc.description.peerreviewedPeer Reviewed
dc.relation.publisherversionhttp://www.sciencedirect.com/science/article/pii/S2211285513001973
dc.rights.accessOpen Access
local.identifier.drac14576676
dc.description.versionPreprint
local.citation.authorPérez, A.; Lopeandía, A. F.; Abad, L.; Ferrando-Villaba, P.; Lopez, A.; García, G.; Muñoz, F.; Rodriguez, J.
local.citation.publicationNameNano Energy
local.citation.volume4
local.citation.startingPage73
local.citation.endingPage80


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