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dc.contributor.authorGiounanlis, Panonios
dc.contributor.authorBlokhina, Elena
dc.contributor.authorFeely, Orla
dc.contributor.authorDomínguez Pumar, Manuel
dc.contributor.authorPons Nin, Joan
dc.contributor.authorGorreta Mariné, Sergio
dc.contributor.otherUniversitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica
dc.date.accessioned2014-03-17T13:17:31Z
dc.date.created2013
dc.date.issued2013
dc.identifier.citationGiounanlis, P. [et al.]. Modelling of a charge control method for capacitive MEMS. A: European Conference on Circuit Theory and Design. "2013 European Conference on Circuit Theory and Design (ECCTD 2013): 8-12 September 2013: Dresden, Germany". Dresden: Institute of Electrical and Electronics Engineers (IEEE), 2013, p. 1-4.
dc.identifier.isbn9781479928576
dc.identifier.urihttp://hdl.handle.net/2117/22152
dc.description.abstractCharging of dielectric materials in microelectromechanical systems (MEMS) actuated electrostatically is a major reliability issue. In our previous work we proposed a feedback loop control method that is implemented as a circuit and that allows smart actuation for switches and varactors. In this paper we discuss system-level modeling of MEMS devices including all aspects of the system: proposed control method, charging dynamics and realistic models of the mechanical components of MEMS.
dc.format.extent4 p.
dc.language.isoeng
dc.publisherInstitute of Electrical and Electronics Engineers (IEEE)
dc.rightsAttribution-NonCommercial-NoDerivs 3.0 Spain
dc.rights.urihttp://creativecommons.org/licenses/by-nc-nd/3.0/es/
dc.subjectÀrees temàtiques de la UPC::Enginyeria electrònica::Microelectrònica::Circuits integrats
dc.subject.lcshIntegrated circuits
dc.subject.lcshMicromechanics
dc.subject.otherMEMS control
dc.subject.otherDielectric charging
dc.subject.otherMEMS reliability
dc.titleModelling of a charge control method for capacitive MEMS
dc.typeConference report
dc.subject.lemacCircuits integrats
dc.subject.lemacMicromecànica
dc.contributor.groupUniversitat Politècnica de Catalunya. MNT - Grup de Recerca en Micro i Nanotecnologies
dc.identifier.doi10.1109/ECCTD.2013.6662324
dc.description.peerreviewedPeer Reviewed
dc.relation.publisherversionhttp://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=6662324&tag=1
dc.rights.accessRestricted access - publisher's policy
local.identifier.drac13432268
dc.description.versionPostprint (published version)
dc.date.lift10000-01-01
local.citation.authorGiounanlis, P.; Blokhina, E.; Feely, O.; Dominguez, M.; Pons, J.; Gorreta, S.
local.citation.contributorEuropean Conference on Circuit Theory and Design
local.citation.pubplaceDresden
local.citation.publicationName2013 European Conference on Circuit Theory and Design (ECCTD 2013): 8-12 September 2013: Dresden, Germany
local.citation.startingPage1
local.citation.endingPage4


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