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Modelling of a charge control method for capacitive MEMS
dc.contributor.author | Giounanlis, Panonios |
dc.contributor.author | Blokhina, Elena |
dc.contributor.author | Feely, Orla |
dc.contributor.author | Domínguez Pumar, Manuel |
dc.contributor.author | Pons Nin, Joan |
dc.contributor.author | Gorreta Mariné, Sergio |
dc.contributor.other | Universitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica |
dc.date.accessioned | 2014-03-17T13:17:31Z |
dc.date.created | 2013 |
dc.date.issued | 2013 |
dc.identifier.citation | Giounanlis, P. [et al.]. Modelling of a charge control method for capacitive MEMS. A: European Conference on Circuit Theory and Design. "2013 European Conference on Circuit Theory and Design (ECCTD 2013): 8-12 September 2013: Dresden, Germany". Dresden: Institute of Electrical and Electronics Engineers (IEEE), 2013, p. 1-4. |
dc.identifier.isbn | 9781479928576 |
dc.identifier.uri | http://hdl.handle.net/2117/22152 |
dc.description.abstract | Charging of dielectric materials in microelectromechanical systems (MEMS) actuated electrostatically is a major reliability issue. In our previous work we proposed a feedback loop control method that is implemented as a circuit and that allows smart actuation for switches and varactors. In this paper we discuss system-level modeling of MEMS devices including all aspects of the system: proposed control method, charging dynamics and realistic models of the mechanical components of MEMS. |
dc.format.extent | 4 p. |
dc.language.iso | eng |
dc.publisher | Institute of Electrical and Electronics Engineers (IEEE) |
dc.rights | Attribution-NonCommercial-NoDerivs 3.0 Spain |
dc.rights.uri | http://creativecommons.org/licenses/by-nc-nd/3.0/es/ |
dc.subject | Àrees temàtiques de la UPC::Enginyeria electrònica::Microelectrònica::Circuits integrats |
dc.subject.lcsh | Integrated circuits |
dc.subject.lcsh | Micromechanics |
dc.subject.other | MEMS control |
dc.subject.other | Dielectric charging |
dc.subject.other | MEMS reliability |
dc.title | Modelling of a charge control method for capacitive MEMS |
dc.type | Conference report |
dc.subject.lemac | Circuits integrats |
dc.subject.lemac | Micromecànica |
dc.contributor.group | Universitat Politècnica de Catalunya. MNT - Grup de Recerca en Micro i Nanotecnologies |
dc.identifier.doi | 10.1109/ECCTD.2013.6662324 |
dc.description.peerreviewed | Peer Reviewed |
dc.relation.publisherversion | http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=6662324&tag=1 |
dc.rights.access | Restricted access - publisher's policy |
local.identifier.drac | 13432268 |
dc.description.version | Postprint (published version) |
dc.date.lift | 10000-01-01 |
local.citation.author | Giounanlis, P.; Blokhina, E.; Feely, O.; Dominguez, M.; Pons, J.; Gorreta, S. |
local.citation.contributor | European Conference on Circuit Theory and Design |
local.citation.pubplace | Dresden |
local.citation.publicationName | 2013 European Conference on Circuit Theory and Design (ECCTD 2013): 8-12 September 2013: Dresden, Germany |
local.citation.startingPage | 1 |
local.citation.endingPage | 4 |