Modelling of a charge control method for capacitive MEMS

Charging of dielectric materials in microelectromechanical systems (MEMS) actuated electrostatically is a major reliability issue. In our previous work we proposed a feedback loop control method that is implemented as a circuit and that allows smart actuation for switches and varactors. In this paper we discuss system-level modeling of MEMS devices including all aspects of the system: proposed control method, charging dynamics and realistic models of the mechanical components of MEMS.

CitationGiounanlis, P. [et al.]. Modelling of a charge control method for capacitive MEMS. A: European Conference on Circuit Theory and Design. "2013 European Conference on Circuit Theory and Design (ECCTD 2013): 8-12 September 2013: Dresden, Germany". Dresden: Institute of Electrical and Electronics Engineers (IEEE), 2013, p. 1-4.

URIhttp://hdl.handle.net/2117/22152

DOI10.1109/ECCTD.2013.6662324

ISBN9781479928576

Publisher versionhttp://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=6662324&tag=1

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