Modelling of a charge control method for capacitive MEMS
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hdl:2117/22152
Document typeConference report
Defense date2013
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
Rights accessRestricted access - publisher's policy
Abstract
Charging of dielectric materials in microelectromechanical
systems (MEMS) actuated electrostatically is a major
reliability issue. In our previous work we proposed a feedback
loop control method that is implemented as a circuit and that
allows smart actuation for switches and varactors. In this paper
we discuss system-level modeling of MEMS devices including
all aspects of the system: proposed control method, charging
dynamics and realistic models of the mechanical components of
MEMS.
CitationGiounanlis, P. [et al.]. Modelling of a charge control method for capacitive MEMS. A: European Conference on Circuit Theory and Design. "2013 European Conference on Circuit Theory and Design (ECCTD 2013): 8-12 September 2013: Dresden, Germany". Dresden: Institute of Electrical and Electronics Engineers (IEEE), 2013, p. 1-4.
ISBN9781479928576
Publisher versionhttp://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=6662324&tag=1
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