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Electro-thermo-mechanical model for bulk acoustic wave resonators

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10.1109/TUFFC.2013.6644742
 
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hdl:2117/21196

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Rocas Cantenys, Eduard
Collado Gómez, Juan CarlosMés informacióMés informacióMés informació
Mateu Mateu, JordiMés informacióMés informacióMés informació
Orloff, Nathan D.
Booth, James C.
Aigner, Robert
Document typeArticle
Defense date2013-11
Rights accessRestricted access - publisher's policy
All rights reserved. This work is protected by the corresponding intellectual and industrial property rights. Without prejudice to any existing legal exemptions, reproduction, distribution, public communication or transformation of this work are prohibited without permission of the copyright holder
Abstract
We present the electro-thermo-mechanical constitutive relations, expanded up to the third order, for a BAW resonator. The relations obtained are implemented into a circuit model, which is validated with extensive linear and nonlinear measurements. The mathematical analysis, along with the modeling, allows us to identify the dominant terms, which are the material temperature derivatives and two intrinsic nonlinear terms, and explain, for the first time, all observable effects in a BAW resonator by use of a unified physical description. Moreover, the terms that are responsible for the second-harmonic generation and the frequency shift with dc voltage are shown to be the same.
CitationRocas, E. [et al.]. Electro-thermo-mechanical model for bulk acoustic wave resonators. "IEEE transactions on Ultrasonics Ferroelectrics and Frequency control", Novembre 2013, vol. 60, núm. 11, p. 2389-2403. 
URIhttp://hdl.handle.net/2117/21196
DOI10.1109/TUFFC.2013.6644742
ISSN0885-3010
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