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Multilayer ISFET membranes for microsystems applications

dc.contributor.authorCané, Carles
dc.contributor.authorGötz, A.
dc.contributor.authorMerlos, A.
dc.contributor.authorGràcia, I.
dc.contributor.authorErrachid, Abdelhamid
dc.contributor.authorLosantos Viñolas, Pedro
dc.contributor.authorLora-Tamayo, E.
dc.contributor.otherUniversitat Politècnica de Catalunya. Departament d'Organització d'Empreses
dc.date.accessioned2013-12-16T15:14:27Z
dc.date.created1996-09-01
dc.date.issued1996-09-01
dc.identifier.citationCané, C. [et al.]. Multilayer ISFET membranes for microsystems applications. "Sensors and actuators B. Chemical", 01 Setembre 1996, vol. 1-3, núm. 136-140, p. 35-36.
dc.identifier.issn0925-4005
dc.identifier.urihttp://hdl.handle.net/2117/21007
dc.description.abstractThe fabrication of microsystems in which chemical measurements play a role make the on-chip combination of chemical sensors and signal processing circuitry highly desirable. Chemical sensors use sensitive layers which are not a part of MOS devices and in this sense, the determination of the best sensors and technological processes to achieve good integrated smart sensors is very important. In this paper a study of compatibility of ISFET chemical sensors and CMOS circuitry is presented for application to biomedical microsystems.
dc.format.extent2 p.
dc.language.isoeng
dc.rightsAttribution-NonCommercial-NoDerivs 3.0 Spain
dc.rights.urihttp://creativecommons.org/licenses/by-nc-nd/3.0/es/
dc.subjectÀrees temàtiques de la UPC::Economia i organització d'empreses
dc.subject.lcshChemical detectors
dc.subject.lcshIntegrated circuits
dc.subject.otherMultilayer ISFET membranes
dc.subject.otherMicrosystem application
dc.titleMultilayer ISFET membranes for microsystems applications
dc.typeArticle
dc.subject.lemacSensors químics
dc.subject.lemacCircuits integrats
dc.identifier.doi10.1016/S0925-4005(97)80043-3
dc.relation.publisherversionhttp://www.sciencedirect.com/science/article/pii/S0925400597800433
dc.rights.accessRestricted access - publisher's policy
local.identifier.drac12919105
dc.description.versionPostprint (published version)
dc.date.lift10000-01-01
local.citation.authorCané, C.; Götz, A.; Merlos, A.; Gràcia, I.; Errachid, A.; Losantos, P.; Lora-Tamayo, E.
local.citation.publicationNameSensors and actuators B. Chemical
local.citation.volume1-3
local.citation.number136-140
local.citation.startingPage35
local.citation.endingPage36


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