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“Silicon millefeuille” : From a silicon wafer to multiple thin crystalline films in a single step
dc.contributor.author | Hernández García, David |
dc.contributor.author | Todorov Trifonov, Trifon |
dc.contributor.author | Garin Escriva, Moises |
dc.contributor.author | Alcubilla González, Ramón |
dc.contributor.other | Universitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica |
dc.date.accessioned | 2013-10-18T12:40:56Z |
dc.date.available | 2013-10-18T12:40:56Z |
dc.date.created | 2013-04-29 |
dc.date.issued | 2013-04-29 |
dc.identifier.citation | Hernandez, D. [et al.]. “Silicon millefeuille” : From a silicon wafer to multiple thin crystalline films in a single step. "Applied physics letters", 29 Abril 2013, vol. 102, núm. 17, p. 1-4. |
dc.identifier.issn | 0003-6951 |
dc.identifier.uri | http://hdl.handle.net/2117/20420 |
dc.description.abstract | During the last years, many techniques have been developed to obtain thin crystalline films from commercial silicon ingots. Large market applications are foreseen in the photovoltaic field, where important cost reductions are predicted, and also in advanced microelectronics technologies as three-dimensional integration, system on foil, or silicon interposers [Dross et al., Prog. Photovoltaics 20, 770-784 (2012); R.Brendel, Thin Film Crystalline Silicon Solar Cells (Wiley-VCH, Weinheim, Germany 2003); J. N. Burghartz, Ultra-Thin Chip Technology and Applications (Springer ScienceþBusiness Media, NY, USA, 2010)]. Existing methods produce “one at a time” silicon layers, once one thin film is obtained, the complete process is repeated to obtain the next layer. Here, we describe a technology that, from a single crystalline silicon wafer, produces a large number of crystalline films with controlled thickness in a single technological step. |
dc.format.extent | 4 p. |
dc.language.iso | eng |
dc.subject | Àrees temàtiques de la UPC::Enginyeria electrònica::Microelectrònica |
dc.subject.lcsh | Nanosilicon. |
dc.subject.lcsh | Crystals. |
dc.subject.lcsh | Microelectronics. |
dc.subject.other | Controlled thickness |
dc.subject.other | Crystalline films |
dc.subject.other | Market applications |
dc.subject.other | Microelectronics technology |
dc.subject.other | Silicon interposers |
dc.subject.other | Single crystalline silicon |
dc.subject.other | Thin film crystalline silicon |
dc.subject.other | Three dimensional integration |
dc.title | “Silicon millefeuille” : From a silicon wafer to multiple thin crystalline films in a single step |
dc.type | Article |
dc.subject.lemac | Nanotecnologia |
dc.subject.lemac | Microelectrònica |
dc.subject.lemac | Cristalls |
dc.subject.lemac | Silicones |
dc.contributor.group | Universitat Politècnica de Catalunya. MNT - Grup de Recerca en Micro i Nanotecnologies |
dc.identifier.doi | 10.1063/1.4803009 |
dc.relation.publisherversion | http://apl.aip.org/resource/1/applab/v102/i17/p172102_s1 |
dc.rights.access | Open Access |
local.identifier.drac | 12670101 |
dc.description.version | Postprint (published version) |
local.citation.author | Hernandez, D.; Trifonov, T.; Garin, M.; Alcubilla, R. |
local.citation.publicationName | Applied physics letters |
local.citation.volume | 102 |
local.citation.number | 17 |
local.citation.startingPage | 1 |
local.citation.endingPage | 4 |
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