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dc.contributor.authorIshihara, D.
dc.contributor.authorHorie, T.
dc.contributor.authorNiho, T.
dc.contributor.authorBaba, A.
dc.description.abstractIn this study, a hierarchal decomposition for the interaction of the structure, fluid and electrostatic field or the structure-fluid-electrostatic interaction, which is one of typical phenomena in micro-electro-mechanical system (MEMS), is proposed in order to solve it efficiently. The proposed decomposition partitions the structure-fluid-electrostatic interaction into the fluid-structure interaction (FSI) and the electrostatic field, and, moreover, splits the FSI into the velocity and fluid pressure fields. In this way, the whole interaction system is decomposed into the three fields in a hierarchal way. The proposed decomposition is implemented using a finite element method and is applied to a micro cantilever beam actuated by the electrostatic force in air. It follows from the comparison among the results for the structure-fluid-electrostatic interaction, the FSI and the experiment that the proposed method taking into account the full-interaction can predict the vibration characteristic of the MEMS accurately.
dc.format.extent6 p.
dc.subjectÀrees temàtiques de la UPC::Matemàtiques i estadística::Anàlisi numèrica::Mètodes en elements finits
dc.subject.lcshFinite element method
dc.subject.lcshCoupled problems (Complex systems) -- Numerical solutions
dc.subject.otherStructure-Fluid-Electric Interaction, Decomposition, Partitioning, Splitting, Finite Element Analysis, Micro-Electro-Mechanical System (MEMS)
dc.titleFinite element analysis using a hierarchal decomposition for the interaction of structure, fluid and electrostatic field in mems
dc.typeConference report
dc.subject.lemacElements finits, Mètode dels
dc.rights.accessOpen Access
local.citation.contributorCOUPLED VI
local.citation.publicationNameCOUPLED VI : proceedings of the VI International Conference on Computational Methods for Coupled Problems in Science and Engineering

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