Electro-thermal characterization of a differential temperature sensor and the thermal coupling in a 65nm CMOS IC
Document typeConference report
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This paper explains the design decisions and the different measurements we have done in order to characterize the thermal coupling and the ch aracteristics of temperature sensors embedded in a integrated circuit implemented in a CMOS 65nm technology. The circu it contains a 2GHz linear power amplifier, MOS transistors behaving as heat sources and two differential temperatu re sensors. Temperature measurements performed with the embedded sensor are corroborated with an Infra-Red camera and a laser interferometer used as thermometer.
CitationAltet, J. [et al.]. Electro-thermal characterization of a differential temperature sensor and the thermal coupling in a 65nm CMOS IC. A: International Workshop on Thermal Investigations of ICs and Systems. "2012 - 18th THERMINIC proceedings". Budapest: 2012, p. 61-66.