Electro-thermal characterization of a differential temperature sensor and the thermal coupling in a 65nm CMOS IC

Abstract

This paper explains the design decisions and the different measurements we have done in order to characterize the thermal coupling and the ch aracteristics of temperature sensors embedded in a integrated circuit implemented in a CMOS 65nm technology. The circu it contains a 2GHz linear power amplifier, MOS transistors behaving as heat sources and two differential temperatu re sensors. Temperature measurements performed with the embedded sensor are corroborated with an Infra-Red camera and a laser interferometer used as thermometer.