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dc.contributor.authorRoyo Royo, Santiago
dc.contributor.authorArasa, Josep
dc.contributor.authorCaum Aregay, Jesús
dc.contributor.otherUniversitat Politècnica de Catalunya. Departament d'Òptica i Optometria
dc.identifier.citationRoyo, S.; Arasa, J.; Caum, J. Micrometric noncontact profiler for optical quality surfaces. "Measurement science and technology", 1 Desembre 2001, vol. 12, núm. 1, p. 89-96.
dc.description.abstractA non-contact technique for obtaining accurate profiles of optical qualitysurfaces with micrometric accuracy has been developed. The technique isbased on the Ronchi test principle, that is, on the study of the interaction of awavefront reflected on the surface to be profiled with a square-wavetransmittance ruling. From the resultant fringe pattern and some basicgeometrical optics principles it is possible to measure the local normal to thesurface being tested at a set of given points. This local normal map may thenbe integrated, yielding the surface profile. By use of a theoretically expectedsurface shape, the main parameters of the surface may then be determined bysurface fitting of the measured data to that expected surface shape. Resultsof the profilometric measurements both of a spherical and of a toroidalsurface are presented. The measured profiles are validated by comparison ofthe radii of curvature obtained using a high precision radioscope with theones obtained by surface fitting of the measured profiles to their expectedsurface shapes. Additionally, subtracting the best-fit theoretical surface fromthe measured profile allows the observation of surface deviations from thetheoretical shape to within some tenths of a nanometres.
dc.format.extent8 p.
dc.subjectÀrees temàtiques de la UPC::Ciències de la visió
dc.subject.lcshSpectrum analysis
dc.subject.lcshOptical measurements
dc.subject.otherRonchi test
dc.subject.otherOptical testing
dc.subject.otherSurface profilometry
dc.subject.otherToroidal surface
dc.subject.otherSpherocylindrical surface
dc.titleMicrometric noncontact profiler for optical quality surfaces
dc.subject.lemacAnàlisi espectral
dc.subject.lemacÒptica -- Mesuraments
dc.contributor.groupUniversitat Politècnica de Catalunya. GREO - Grup de Recerca en Enginyeria Òptica
dc.description.peerreviewedPeer Reviewed
dc.rights.accessRestricted access - publisher's policy
dc.description.versionPostprint (published version)
local.citation.authorRoyo, S.; Arasa, J.; Caum, J.
local.citation.publicationNameMeasurement science and technology

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