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dc.contributor.authorGirbau Sala, David
dc.contributor.authorPradell i Cara, Lluís
dc.contributor.authorLázaro Guillén, Antoni
dc.contributor.authorNebot Serra, Àlvar
dc.contributor.otherUniversitat Politècnica de Catalunya. Departament de Teoria del Senyal i Comunicacions
dc.identifier.citationGirbau, D.; Pradell, L.; Lazaro, A.; Nebot, A. Electrothermally actuated RF MEMS switches suspended on a low-resistivity substrate. Journal of microelectromechanical systems, 2007, vol. 16, núm. 5, p. 1061-1070.
dc.description.abstractThis paper presents an electrothermally actuated lateral resistive-contact switch for application to low-gigahertz-band communication systems. It was manufactured on a standard low-resistivity substrate, and its RF performance was improved by suspending the structures 25 μm from the substrate, which is a strategy for future integration with active devices in the system-on-chip concept. Measured insertion losses are−0.26 dB at 1 GHz and −0.65 dB at 6 GHz, return losses are −29 dB at 1 GHz and −25 dB at 6 GHz, and isolations are −52 dB at 1 GHz and −26 dB at 6 GHz. The device is driven by a metal electrothermal actuator, which achieves large displacements and contact forces at much lower temperatures than traditional polysilicon electrothermal actuators. The RF power handling characteristics are also addressed and measured.
dc.subjectÀrees temàtiques de la UPC::Enginyeria electrònica::Microelectrònica
dc.subject.lcshMicroelectromechanical systems
dc.subject.othermicrowave switches
dc.subject.otherloss -0.26 dB
dc.subject.otherloss -0.65 dB
dc.subject.otherloss -29 dB
dc.subject.otherloss -25 dB
dc.subject.otherfrequency 1 GHz
dc.subject.otherfrequency 6 GHz
dc.subject.otherelectrothermally actuated RF MEMS switches
dc.subject.otherlow-resistivity substrate
dc.subject.otherelectrothermally actuated lateral resistive-contact switch
dc.subject.otherlow-gigahertz-band communication systems
dc.subject.othersystem-on-chip concept
dc.subject.othermetal electrothermal actuator
dc.subject.othercontact forces
dc.subject.otherpolysilicon electrothermal actuators
dc.subject.otherRF power handling characteristics
dc.subject.othermicroelectromechanical systems switch
dc.titleElectrothermally actuated RF MEMS switches suspended on a low-resistivity substrate
dc.subject.lemacSistemes microelectromecànics
dc.contributor.groupUniversitat Politècnica de Catalunya. RF&MW - Grup de Recerca de sistemes, dispositius i materials de RF i microones
dc.description.peerreviewedPeer Reviewed
dc.rights.accessOpen Access

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