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dc.contributor.authorCardador Maza, David
dc.contributor.authorSegura García, Daniel
dc.contributor.authorDeriziotis, Ioannis
dc.contributor.authorRodríguez Martínez, Ángel
dc.contributor.authorLlorca Piqué, Jordi
dc.contributor.otherUniversitat Politècnica de Catalunya. Doctorat en Enginyeria Electrònica
dc.contributor.otherUniversitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica
dc.contributor.otherUniversitat Politècnica de Catalunya. Departament d'Enginyeria Química
dc.identifier.citationCardador, D. [et al.]. Macroporous silicon filters, a versatile platform for NDIR spectroscopic gas sensing in the MIR. "Journal of the Electrochemical Society", 23 Juliol 2019, vol. 166, núm. 12, p. B1010-B1015.
dc.description© The Author(s) 2019. Published by ECS. This is an open access article distributed under the terms of the Creative CommonsAttribution 4.0 License (CC BY,, which permits unrestricted reuse of the work in anymedium, provided the original work is properly cited.
dc.description.abstractThis paper describes the spectroscopic detection of gases using macroporous silicon photonic crystals as narrow filters. The study begins by demonstrating the feasibility of photoelectrochemical etching to fabricate narrow filters along the mid infrared band. Next, we focus on the filter centered on the carbon dioxide fingerprint. The filter response is described for three different cell lengths and concentrations below 1%. Results show a concordance with the reformulated Beer-Lambert law. This can be used to predict the response of the filter for longer path lengths and higher concentrations, showing broad working ranges and compact sizes for CO2. In addition, optical robustness to external variations and long-term stability are also reported. Results are extrapolated to other macroporous silicon filters centered on the absorption spectra of N2O, OCS, NO2 and SO2. Finally, high sensitivity and selectivity is demonstrated by comparing them with some commercial filters.
dc.rightsAttribution-NonCommercial-NoDerivs 3.0 Spain
dc.subjectÀrees temàtiques de la UPC::Enginyeria electrònica::Instrumentació i mesura::Sensors i actuadors
dc.subject.lcshSpectrum analysis
dc.subject.otherEtching - alectrochemical
dc.subject.otherMacroporous silicon photonic crystals
dc.subject.otherNarrow filters
dc.subject.otherSpectroscopic detection
dc.titleMacroporous silicon filters, a versatile platform for NDIR spectroscopic gas sensing in the MIR
dc.subject.lemacAnàlisi espectral
dc.subject.lemacCristalls fotònics
dc.subject.lemacCristalls de silici
dc.contributor.groupUniversitat Politècnica de Catalunya. MNT - Grup de Recerca en Micro i Nanotecnologies
dc.contributor.groupUniversitat Politècnica de Catalunya. NEMEN - Nanoenginyeria de materials aplicats a l'energia
dc.rights.accessOpen Access
dc.description.versionPostprint (published version)
local.citation.authorCardador, D.; Segura, D.; Deriziotis, I.; Rodriguez, A.; Llorca, J.
local.citation.publicationNameJournal of the Electrochemical Society

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Attribution-NonCommercial-NoDerivs 3.0 Spain
Except where otherwise noted, content on this work is licensed under a Creative Commons license : Attribution-NonCommercial-NoDerivs 3.0 Spain