Macroporous silicon filters, a versatile platform for NDIR spectroscopic gas sensing in the MIR
Rights accessOpen Access
This paper describes the spectroscopic detection of gases using macroporous silicon photonic crystals as narrow filters. The study begins by demonstrating the feasibility of photoelectrochemical etching to fabricate narrow filters along the mid infrared band. Next, we focus on the filter centered on the carbon dioxide fingerprint. The filter response is described for three different cell lengths and concentrations below 1%. Results show a concordance with the reformulated Beer-Lambert law. This can be used to predict the response of the filter for longer path lengths and higher concentrations, showing broad working ranges and compact sizes for CO2. In addition, optical robustness to external variations and long-term stability are also reported. Results are extrapolated to other macroporous silicon filters centered on the absorption spectra of N2O, OCS, NO2 and SO2. Finally, high sensitivity and selectivity is demonstrated by comparing them with some commercial filters.
© The Author(s) 2019. Published by ECS. This is an open access article distributed under the terms of the Creative CommonsAttribution 4.0 License (CC BY,http://creativecommons.org/licenses/by/4.0/), which permits unrestricted reuse of the work in anymedium, provided the original work is properly cited.
CitationCardador, D. [et al.]. Macroporous silicon filters, a versatile platform for NDIR spectroscopic gas sensing in the MIR. "Journal of the Electrochemical Society", 23 Juliol 2019, vol. 166, núm. 12, p. B1010-B1015.
- MNT - Grup de Recerca en Micro i Nanotecnologies - Articles de revista 
- NEMEN - Nanoenginyeria de materials aplicats a l'energia - Articles de revista 
- Doctorat en Enginyeria Electrònica - Articles de revista 
- Departament d'Enginyeria Electrònica - Articles de revista [1.277]
- Departament d'Enginyeria Química - Articles de revista [1.551]