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dc.contributor.authorGirbau Sala, David
dc.contributor.authorLlamas Morote, Marco Antonio
dc.contributor.authorCasals Terré, Jasmina
dc.contributor.authorSimó Selvas, Francisco Javier
dc.contributor.authorPradell i Cara, Lluís
dc.contributor.authorLázaro Guillén, Antoni
dc.contributor.otherUniversitat Politècnica de Catalunya. Departament de Teoria del Senyal i Comunicacions
dc.date.accessioned2008-03-06T12:48:35Z
dc.date.available2008-03-06T12:48:35Z
dc.date.created2007-06
dc.date.issued2007-06-30
dc.identifier.citationGirbau, D.; Llamas, M. A.; Casals, J.; Simó, X.; Pradell, L.; Lázaro, A. A low-power-consumption out-of-Plane electrothermal actuator. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2007, vol. 16, núm. 3, p. 719-727.
dc.identifier.issn1057-7157
dc.identifier.urihttp://hdl.handle.net/2117/1780
dc.description.abstractThis paper proposes a new vertical electrothermal actuator. It can be considered as a hybrid between the traditional in-plane buckle-beam actuator and the vertical hot-cold actuator. It is here referred to as vertical buckle beam. At identical dimensional and bias conditions, it features a displacement larger than that of other vertical electrothermal actuators proposed so far in the literature. The actuator performance is demonstrated by means of an analytical model along with finite-element analysis. It is applied as a driving element in parallel-plate capacitors, where it is validated and its advantages in terms of power consumption are demonstrated empirically.
dc.format.extent719-727
dc.language.isoeng
dc.publisherIEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
dc.subjectÀrees temàtiques de la UPC::Enginyeria de la telecomunicació::Radiocomunicació i exploració electromagnètica::Circuits de microones, radiofreqüència i ones mil·limètriques
dc.subject.lcshMicroelectromechanical systems
dc.subject.lcshCapacitors
dc.subject.otherCapacitors
dc.subject.otherFinite element analysis
dc.subject.otherLow-power electronics
dc.subject.otherMicroactuators
dc.subject.otherMEMS
dc.subject.otherparallel-plate capacitors
dc.subject.otherFinite-element analysis
dc.subject.otherVertical hot-cold actuator
dc.subject.otherIn-plane buckle-beam actuator
dc.subject.otherElectrothermal actuator
dc.subject.otherLow-power-consumption
dc.titleA low-power-consumption out-of-Plane electrothermal actuator
dc.typeArticle
dc.subject.lemacMicroelectromechanical systems
dc.contributor.groupUniversitat Politècnica de Catalunya. RF&MW - Grup de Recerca de sistemes, dispositius i materials de RF i microones
dc.description.peerreviewedPeer Reviewed
dc.rights.accessOpen Access


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