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Nano particles in SiH4-Ar plasma: Modelling and comparison with experimental data
dc.contributor.author | Gordiets, F.B. |
dc.contributor.author | Inestrosa-Izurieta, M.J. |
dc.contributor.author | Navarro Sentanyes, Antonio |
dc.contributor.author | Bertran, Enric |
dc.contributor.other | Universitat Politècnica de Catalunya. Departament d'Enginyeria Química |
dc.date.accessioned | 2012-03-22T11:50:05Z |
dc.date.available | 2012-03-22T11:50:05Z |
dc.date.created | 2011-11-24 |
dc.date.issued | 2011-11-24 |
dc.identifier.citation | Gordiets, F. [et al.]. Nano particles in SiH4-Ar plasma: Modelling and comparison with experimental data. "Journal of applied physics", 24 Novembre 2011, vol. 110, núm. 103302, p. 1-8. |
dc.identifier.issn | 0021-8979 |
dc.identifier.uri | http://hdl.handle.net/2117/15643 |
dc.format.extent | 8 p. |
dc.language.iso | eng |
dc.publisher | American Institute of Physics (AIP) |
dc.publisher | Published by American Institute of Physics |
dc.rights | Copyright by B.F. Gordiets, M.J. Inestrosa-Izurieta, A. Navarro and E. Bertran |
dc.rights.uri | http://creativecommons.org/licenses/by-nc-nd/3.0/es/ |
dc.source | Citation: J. Appl. Phys. 110, 103302 (2011); doi:10.1063/1.3658249 |
dc.subject | Àrees temàtiques de la UPC::Física |
dc.subject.lcsh | Nanoparticles |
dc.subject.lcsh | Nanotechnology |
dc.subject.lcsh | Thin films |
dc.subject.lcsh | Plasma chemistry |
dc.title | Nano particles in SiH4-Ar plasma: Modelling and comparison with experimental data |
dc.type | Article |
dc.subject.lemac | Nanopartícules |
dc.subject.lemac | Nanotecnologia |
dc.subject.lemac | Pel·lícules fines |
dc.subject.lemac | Plasma |
dc.contributor.group | Universitat Politècnica de Catalunya. SPPT - Superfícies, Productes i Processos Tèxtils |
dc.identifier.doi | 10.1063/1.3658249 |
dc.rights.access | Open Access |
local.identifier.drac | 9919807 |
dc.description.version | Postprint (published version) |
local.citation.author | Gordiets, F.; Inestrosa-Izurieta, M.; Navarro, A.; BERTRAN, E. |
local.citation.publicationName | Journal of applied physics |
local.citation.volume | 110 |
local.citation.number | 103302 |
local.citation.startingPage | 1 |
local.citation.endingPage | 8 |
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