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Microelectromechanical resonators based on an all polymer/carbon nanotube composite structural material

Sousa, P.M.; Gutierrez, M.; Mendoza Gómez, Ernesto; Llobera, A.; Chu, V.; Conde, J.P. (2011-07-25)
Article
Open Access
Carboxylated multi-wall carbon-nanotubes (CNTs) monolayers are integrated on microfabricated all-polymer micro-electromechanical systems (pMEMS) resonator bridges on glass substrates. The structural layer of the MEMS bridges ...