| dc.contributor.author | Fernández Martínez, Daniel |
| dc.contributor.author | Madrenas Boadas, Jordi |
| dc.contributor.author | Cosp Vilella, Jordi |
| dc.contributor.other | Universitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica |
| dc.date.accessioned | 2011-09-14T12:46:10Z |
| dc.date.available | 2011-09-14T12:46:10Z |
| dc.date.created | 2011-03 |
| dc.date.issued | 2011-03 |
| dc.identifier.citation | Fernandez, D.; Madrenas, J.; Cosp, J. A self-test and dynamics characterization circuit for MEMS electrostatic actuators. "Microelectronics reliability", Març 2011, vol. 51, núm. 3, p. 602-609. |
| dc.identifier.issn | 0026-2714 |
| dc.identifier.uri | http://hdl.handle.net/2117/13195 |
| dc.description.abstract | This paper presents a high-bandwidth capacitance estimation and driving circuit especially tailored for its use with MEMS electrostatic actuators. The circuit can be integrated as a part of a system comprising
an electrostatic actuator to provide self-testing and failure prediction capabilities and also as a simple and
low-cost actuator dynamics characterization system capable of measuring both periodic and nonperiodic movements. |
| dc.format.extent | 8 p. |
| dc.language.iso | eng |
| dc.subject | Àrees temàtiques de la UPC::Informàtica::Hardware |
| dc.subject.lcsh | MEMS |
| dc.subject.lcsh | Microelectromechanical systems |
| dc.subject.lcsh | Actuators -- Design and construction |
| dc.subject.lcsh | Electrostatic actuators |
| dc.title | A self-test and dynamics characterization circuit for MEMS electrostatic actuators |
| dc.type | Article |
| dc.subject.lemac | Sistemes microelectromecànics |
| dc.subject.lemac | Actuadors |
| dc.contributor.group | Universitat Politècnica de Catalunya. AHA - Arquitectures Hardware Avançades |
| dc.identifier.doi | 10.1016/j.microrel.2010.09.027 |
| dc.description.peerreviewed | Peer Reviewed |
| dc.rights.access | Restricted access - publisher's policy |
| local.identifier.drac | 5412608 |
| dc.description.version | Postprint (published version) |
| local.citation.author | Fernandez, D.; Madrenas, J.; Cosp, J. |
| local.citation.publicationName | Microelectronics reliability |
| local.citation.volume | 51 |
| local.citation.number | 3 |
| local.citation.startingPage | 602 |
| local.citation.endingPage | 609 |
