A self-test and dynamics characterization circuit for MEMS electrostatic actuators

Fernández Martínez, Daniel; Madrenas Boadas, Jordi; Cosp Vilella, Jordi

doi:10.1016/j.microrel.2010.09.027

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Fernández Martínez, Daniel

Madrenas Boadas, Jordi

Cosp Vilella, Jordi

Document typeArticle

Defense date2011-03

Rights accessRestricted access - publisher's policy

All rights reserved. This work is protected by the corresponding intellectual and industrial property rights. Without prejudice to any existing legal exemptions, reproduction, distribution, public communication or transformation of this work are prohibited without permission of the copyright holder

Abstract

This paper presents a high-bandwidth capacitance estimation and driving circuit especially tailored for its use with MEMS electrostatic actuators. The circuit can be integrated as a part of a system comprising an electrostatic actuator to provide self-testing and failure prediction capabilities and also as a simple and low-cost actuator dynamics characterization system capable of measuring both periodic and nonperiodic movements.

CitationFernandez, D.; Madrenas, J.; Cosp, J. A self-test and dynamics characterization circuit for MEMS electrostatic actuators. "Microelectronics reliability", Març 2011, vol. 51, núm. 3, p. 602-609.

URIhttp://hdl.handle.net/2117/13195

DOI10.1016/j.microrel.2010.09.027

ISSN0026-2714

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