Show simple item record

dc.contributor.authorPradell i Cara, Lluís
dc.contributor.authorGirbau Sala, David
dc.contributor.authorRibó Pal, Miquel
dc.contributor.authorCasals Terré, Jasmina
dc.contributor.authorLázaro Guillén, Antonio
dc.contributor.authorContreras Lizárraga, Adrián
dc.contributor.authorLlamas Morote, Marco Antonio
dc.contributor.authorHeredia Vega, Julio César
dc.contributor.authorGiacomozzi, Flavio
dc.contributor.authorMargesin, Benno
dc.contributor.otherUniversitat Politècnica de Catalunya. Departament de Teoria del Senyal i Comunicacions
dc.contributor.otherUniversitat Politècnica de Catalunya. Departament d'Enginyeria Mecànica
dc.identifier.citationPradell, L. [et al.]. RF-MEMS switches designed for high-performance uniplanar microwave and mm-wave circuits. A: "MEMS sensors: design and application". London: IntechOpen, 2018, p. 117-146.
dc.description.abstractRadio frequency microelectromechanical system (RF-MEMS) switches have demonstrated superior electrical performance (lower loss and higher isolation) compared to semiconductor-based devices to implement reconigurable microwave and millimeter(mm)-wave circuits. In this chapter, electrostatically actuated RF-MEMS switch conigurations that can be easily integrated in uniplanar circuits are presented. The design procedure and fabrication process of RF-MEMS switch topologies able to control the propagating modes of multimodal uniplanar structures (those based on a combination of coplanar waveguide (CPW), coplanar stripline (CPS), and slotline) will be described in detail. Generalized electrical (multimodal) and mechanical models will be presented and applied to the switch design and simulation. The switch-simulated results are compared to measurements, conirming the expected performances. Using an integrated RF-MEMS surface micromachining process, high-performance multimodal reconigurable circuits, such as phase switches and ilters, are developed with the proposed switch conigurations. The design and optimization of these circuits are discussed and the simulated results compared to measurements.
dc.format.extent30 p.
dc.rightsAttribution-NonCommercial-NoDerivs 3.0 Spain
dc.subjectÀrees temàtiques de la UPC::Enginyeria electrònica::Microelectrònica::Circuits integrats
dc.subject.lcshMicroelectromechanical systems
dc.subject.otherRF-MEMS switches
dc.subject.otherMEMS fabrication technology
dc.subject.otherReconigurable microwave circuits
dc.subject.otherUniplanar multimodal circuits
dc.subject.otherCircuit simulation
dc.subject.otherElectromechanical simulation
dc.subject.otherPhase switches
dc.titleRF-MEMS switches designed for high-performance uniplanar microwave and mm-wave circuits
dc.typePart of book or chapter of book
dc.subject.lemacSistemes microelectromecànics
dc.contributor.groupUniversitat Politècnica de Catalunya. RF&MW - Grup de Recerca de sistemes, dispositius i materials de RF i microones
dc.contributor.groupUniversitat Politècnica de Catalunya. MICROTECH LAB - Microtechnology for the Industry
dc.description.peerreviewedPeer Reviewed
dc.rights.accessOpen Access
dc.description.versionPostprint (published version)
local.citation.authorPradell, L.; Girbau, D.; Ribó, M.; Casals-Terré, J.; Lázaro, A.; Contreras, A.; Llamas, M.; Heredia, J.; Giacomozzi, F.; Margesin, B.
local.citation.publicationNameMEMS sensors: design and application

Files in this item


This item appears in the following Collection(s)

Show simple item record

Attribution-NonCommercial-NoDerivs 3.0 Spain
Except where otherwise noted, content on this work is licensed under a Creative Commons license : Attribution-NonCommercial-NoDerivs 3.0 Spain