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RF-MEMS switches designed for high-performance uniplanar microwave and mm-wave circuits

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Pradell i Cara, LluísMés informacióMés informacióMés informació
Girbau Sala, David
Ribó Pal, Miquel
Casals Terré, JasminaMés informacióMés informacióMés informació
Lázaro Guillén, Antonio
Contreras Lizárraga, Adrián
Llamas Morote, Marco Antonio
Heredia Vega, Julio César
Giacomozzi, Flavio
Margesin, Benno
Document typePart of book or chapter of book
Defense date2018-07-18
PublisherIntechOpen
Rights accessOpen Access
Attribution-NonCommercial-NoDerivs 3.0 Spain
Except where otherwise noted, content on this work is licensed under a Creative Commons license : Attribution-NonCommercial-NoDerivs 3.0 Spain
Abstract
Radio frequency microelectromechanical system (RF-MEMS) switches have demonstrated superior electrical performance (lower loss and higher isolation) compared to semiconductor-based devices to implement reconigurable microwave and millimeter(mm)-wave circuits. In this chapter, electrostatically actuated RF-MEMS switch conigurations that can be easily integrated in uniplanar circuits are presented. The design procedure and fabrication process of RF-MEMS switch topologies able to control the propagating modes of multimodal uniplanar structures (those based on a combination of coplanar waveguide (CPW), coplanar stripline (CPS), and slotline) will be described in detail. Generalized electrical (multimodal) and mechanical models will be presented and applied to the switch design and simulation. The switch-simulated results are compared to measurements, conirming the expected performances. Using an integrated RF-MEMS surface micromachining process, high-performance multimodal reconigurable circuits, such as phase switches and ilters, are developed with the proposed switch conigurations. The design and optimization of these circuits are discussed and the simulated results compared to measurements.
CitationPradell, L. [et al.]. RF-MEMS switches designed for high-performance uniplanar microwave and mm-wave circuits. A: "MEMS sensors: design and application". London: IntechOpen, 2018, p. 117-146. 
URIhttp://hdl.handle.net/2117/128333
DOI10.5772/intechopen.71153
ISBN978-1-78923-395-7
Publisher versionhttps://www.intechopen.com/books/mems-sensors-design-and-application
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  • MICROTECH LAB - Microtechnology for the Industry - Capítols de llibre [1]
  • RF&MW - Grup de Recerca de Sistemes, Dispositius i Materials de RF i Microones - Capítols de llibre [3]
  • Departament d'Enginyeria mecànica - Capítols de llibre [18]
  • Departament de Teoria del Senyal i Comunicacions - Capítols de llibre [95]
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