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Design and test of resonators using PiezoMUMPS technology
dc.contributor.author | Pons Nin, Joan |
dc.contributor.author | Gorreta Mariné, Sergio |
dc.contributor.author | Domínguez Pumar, Manuel |
dc.contributor.author | Blokhina, Elena |
dc.contributor.author | O'Connell, D. |
dc.contributor.author | Feely, Orla |
dc.contributor.other | Universitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica |
dc.date.accessioned | 2018-07-31T10:34:55Z |
dc.date.available | 2018-07-31T10:34:55Z |
dc.date.issued | 2015 |
dc.identifier.citation | Pons, J., Gorreta, S., Dominguez, M., Blokhina, E., O'Connell, D., Feely, O. Design and test of resonators using PiezoMUMPS technology. A: Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS. "2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP 2014): Cannes, France: 1-4 April 2014". Institute of Electrical and Electronics Engineers (IEEE), 2015, p. 1-4. |
dc.identifier.isbn | 978-2-35500-028-7 |
dc.identifier.uri | http://hdl.handle.net/2117/120352 |
dc.description | © 2015 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes,creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works. |
dc.description.abstract | This paper presents preliminary results obtained with devices fabricated with the new PiezoMUMPS process. Since these devices will be used as resonators in applications based on Pulsed Digital Oscillators, we analyze, both with simulations and measurements, the mechanical vibration modes that can be excited and detected. We also introduce a specific version of PDO for piezoelectric MEMS. |
dc.format.extent | 4 p. |
dc.language.iso | eng |
dc.publisher | Institute of Electrical and Electronics Engineers (IEEE) |
dc.subject | Àrees temàtiques de la UPC::Enginyeria electrònica::Microelectrònica::Circuits integrats |
dc.subject.lcsh | Integrated circuits |
dc.subject.other | Piezo-MEMS |
dc.subject.other | MEMS resonators |
dc.subject.other | Mechanical modes |
dc.title | Design and test of resonators using PiezoMUMPS technology |
dc.type | Conference report |
dc.subject.lemac | Circuits integrats |
dc.contributor.group | Universitat Politècnica de Catalunya. MNT - Grup de Recerca en Micro i Nanotecnologies |
dc.identifier.doi | 10.1109/DTIP.2014.7056666 |
dc.description.peerreviewed | Peer Reviewed |
dc.relation.publisherversion | https://ieeexplore.ieee.org/document/7056666/ |
dc.rights.access | Open Access |
local.identifier.drac | 23256087 |
dc.description.version | Postprint (author's final draft) |
dc.relation.projectid | info:eu-repo/grantAgreement/MINECO//TEC2013-48102-C2-1-P/ES/DISEÑO DE TECNOLOGIAS INTEGRADAS RECONFIGURABLES DE MICROONDAS CON MEMS DE RF/ |
local.citation.author | Pons, J.; Gorreta, S.; Dominguez, M.; Blokhina, E.; O'Connell, D.; Feely, O. |
local.citation.contributor | Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS |
local.citation.publicationName | 2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP 2014): Cannes, France: 1-4 April 2014 |
local.citation.startingPage | 1 |
local.citation.endingPage | 4 |