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dc.contributor.authorPons Nin, Joan
dc.contributor.authorGorreta Mariné, Sergio
dc.contributor.authorDomínguez Pumar, Manuel
dc.contributor.authorBlokhina, Elena
dc.contributor.authorO'Connell, D.
dc.contributor.authorFeely, Orla
dc.contributor.otherUniversitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica
dc.date.accessioned2018-07-31T10:34:55Z
dc.date.available2018-07-31T10:34:55Z
dc.date.issued2015
dc.identifier.citationPons, J., Gorreta, S., Dominguez, M., Blokhina, E., O'Connell, D., Feely, O. Design and test of resonators using PiezoMUMPS technology. A: Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS. "2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP 2014): Cannes, France: 1-4 April 2014". Institute of Electrical and Electronics Engineers (IEEE), 2015, p. 1-4.
dc.identifier.isbn978-2-35500-028-7
dc.identifier.urihttp://hdl.handle.net/2117/120352
dc.description© 2015 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes,creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
dc.description.abstractThis paper presents preliminary results obtained with devices fabricated with the new PiezoMUMPS process. Since these devices will be used as resonators in applications based on Pulsed Digital Oscillators, we analyze, both with simulations and measurements, the mechanical vibration modes that can be excited and detected. We also introduce a specific version of PDO for piezoelectric MEMS.
dc.format.extent4 p.
dc.language.isoeng
dc.publisherInstitute of Electrical and Electronics Engineers (IEEE)
dc.subjectÀrees temàtiques de la UPC::Enginyeria electrònica::Microelectrònica::Circuits integrats
dc.subject.lcshIntegrated circuits
dc.subject.otherPiezo-MEMS
dc.subject.otherMEMS resonators
dc.subject.otherMechanical modes
dc.titleDesign and test of resonators using PiezoMUMPS technology
dc.typeConference report
dc.subject.lemacCircuits integrats
dc.contributor.groupUniversitat Politècnica de Catalunya. MNT - Grup de Recerca en Micro i Nanotecnologies
dc.identifier.doi10.1109/DTIP.2014.7056666
dc.description.peerreviewedPeer Reviewed
dc.relation.publisherversionhttps://ieeexplore.ieee.org/document/7056666/
dc.rights.accessOpen Access
local.identifier.drac23256087
dc.description.versionPostprint (author's final draft)
dc.relation.projectidinfo:eu-repo/grantAgreement/MINECO//TEC2013-48102-C2-1-P/ES/DISEÑO DE TECNOLOGIAS INTEGRADAS RECONFIGURABLES DE MICROONDAS CON MEMS DE RF/
local.citation.authorPons, J.; Gorreta, S.; Dominguez, M.; Blokhina, E.; O'Connell, D.; Feely, O.
local.citation.contributorSymposium on Design, Test, Integration and Packaging of MEMS/MOEMS
local.citation.publicationName2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP 2014): Cannes, France: 1-4 April 2014
local.citation.startingPage1
local.citation.endingPage4


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