Design and test of resonators using PiezoMUMPS technology
Document typeConference report
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
Rights accessOpen Access
This paper presents preliminary results obtained with devices fabricated with the new PiezoMUMPS process. Since these devices will be used as resonators in applications based on Pulsed Digital Oscillators, we analyze, both with simulations and measurements, the mechanical vibration modes that can be excited and detected. We also introduce a specific version of PDO for piezoelectric MEMS.
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CitationPons, J., Gorreta, S., Dominguez, M., Blokhina, E., O'Connell, D., Feely, O. Design and test of resonators using PiezoMUMPS technology. A: Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS. "2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP 2014): Cannes, France: 1-4 April 2014". Institute of Electrical and Electronics Engineers (IEEE), 2015, p. 1-4.