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P3R-3 design and characterization of air coupled ultrasonic transducers based on MUMPs
| dc.contributor.author | Martínez Graullera, Óscar Fernando |
| dc.contributor.author | Martín Arguedas, Carlos Julián |
| dc.contributor.author | Gómez-Ullate Alvear, Luis |
| dc.contributor.author | Domínguez Pumar, Manuel |
| dc.contributor.other | Universitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica |
| dc.date.accessioned | 2018-07-31T10:14:18Z |
| dc.date.available | 2018-07-31T10:14:18Z |
| dc.date.issued | 2007 |
| dc.identifier.citation | Martínez, Ó. F., Martín, C. J., Gómez-Ullate, L., Dominguez, M. P3R-3 design and characterization of air coupled ultrasonic transducers based on MUMPs. A: IEEE International Ultrasonics Symposium. "2006 IEEE Ultrasonics Symposium: Vancouver, Canada: 3-6 October 2006". Institute of Electrical and Electronics Engineers (IEEE), 2007, p. 2373-2376. |
| dc.identifier.isbn | 1-4244-0201-8 |
| dc.identifier.uri | http://hdl.handle.net/2117/120342 |
| dc.description.abstract | This paper deals with the design and characterization of several capacitive micromachined ultrasonic transducer (cMUT) cells for the future design of an air-coupled transducer for non destructive testing (NDT). Each design was manufactured using the multi-user MEMS process (MUMPs). Special boundary conditions were used to obtain high efficiency: two opposite sides of the 150 mum square shaped membranes are free while the other sides are anchored to a fixed layer of the process. Using these designs a large displacement of the membrane and a higher surface contact is obtained in spite of their mechanical losses |
| dc.format.extent | 4 p. |
| dc.language.iso | eng |
| dc.publisher | Institute of Electrical and Electronics Engineers (IEEE) |
| dc.subject | Àrees temàtiques de la UPC::Enginyeria de la telecomunicació::Processament del senyal::Processament de la parla i del senyal acústic |
| dc.subject.lcsh | Ultrasonic waves |
| dc.subject.other | Micromachining |
| dc.subject.other | Micromechanical devices |
| dc.subject.other | Ultrasonic materials testing |
| dc.subject.other | Ultrasonic transducers |
| dc.title | P3R-3 design and characterization of air coupled ultrasonic transducers based on MUMPs |
| dc.type | Conference report |
| dc.subject.lemac | Ultrasons |
| dc.contributor.group | Universitat Politècnica de Catalunya. MNT - Grup de Recerca en Micro i Nanotecnologies |
| dc.identifier.doi | 10.1109/ULTSYM.2006.603 |
| dc.description.peerreviewed | Peer Reviewed |
| dc.relation.publisherversion | https://ieeexplore.ieee.org/abstract/document/4152459/ |
| dc.rights.access | Open Access |
| local.identifier.drac | 23256315 |
| dc.description.version | Postprint (published version) |
| local.citation.author | Martínez, Ó. F.; Martín, C. J.; Gómez-Ullate, L.; Dominguez, M. |
| local.citation.contributor | IEEE International Ultrasonics Symposium |
| local.citation.publicationName | 2006 IEEE Ultrasonics Symposium: Vancouver, Canada: 3-6 October 2006 |
| local.citation.startingPage | 2373 |
| local.citation.endingPage | 2376 |
