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dc.contributor.authorGorreta Mariné, Sergio
dc.contributor.authorPons Nin, Joan
dc.contributor.authorDomínguez Pumar, Manuel
dc.contributor.authorBlokhina, Elena
dc.contributor.authorFeely, Orla
dc.contributor.otherUniversitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica
dc.date.accessioned2018-07-27T18:01:21Z
dc.date.issued2015
dc.identifier.citationGorreta, S., Pons, J., Dominguez, M., Blokhina, E., Feely, O. Characterization method of the dynamics of the trapped charge in contactless capacitive MEMS. A: Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS. "2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP 2014): Cannes, France: 1-4 April 2014". Institute of Electrical and Electronics Engineers (IEEE), 2015, p. 1-6.
dc.identifier.isbn978-2-35500-028-7
dc.identifier.urihttp://hdl.handle.net/2117/120172
dc.description.abstractDielectric charging of insulating films in microelectromechanical systems (MEMS) has a crucial effect on the operation of those devices. A new method is presented in order to characterize the dynamics of the charge trapped in the dielectric layer of MEMS devices. This allows knowing the state of the charge at each sampling time without distorting the measurement. This approach allows one to model the expected behaviour of the trapped charge inside the dielectric as a response to a sigma-delta control of charge. The goodness of the proposed approach is obtained by matching the experimentally obtained closed loop response with the one predicted by the model obtained using the proposed characterization method.
dc.format.extent6 p.
dc.language.isoeng
dc.publisherInstitute of Electrical and Electronics Engineers (IEEE)
dc.subjectÀrees temàtiques de la UPC::Enginyeria elèctrica
dc.subjectDielèctrics
dc.subject.lcshMicroelectromechanical systems
dc.subject.lcshDielectrics
dc.subject.otherMEMS reliability
dc.subject.otherDielectric charge dynamics
dc.titleCharacterization method of the dynamics of the trapped charge in contactless capacitive MEMS
dc.typeConference report
dc.subject.lemacSistemes microelectromecànics
dc.contributor.groupUniversitat Politècnica de Catalunya. MNT - Grup de Recerca en Micro i Nanotecnologies
dc.identifier.doi10.1109/DTIP.2014.7056667
dc.description.peerreviewedPeer Reviewed
dc.relation.publisherversionhttps://ieeexplore.ieee.org/abstract/document/7056667/
dc.rights.accessRestricted access - publisher's policy
drac.iddocument23255905
dc.description.versionPostprint (published version)
dc.date.lift10000-01-01
upcommons.citation.authorGorreta, S., Pons, J., Dominguez, M., Blokhina, E., Feely, O.
upcommons.citation.contributorSymposium on Design, Test, Integration and Packaging of MEMS/MOEMS
upcommons.citation.publishedtrue
upcommons.citation.publicationName2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP 2014): Cannes, France: 1-4 April 2014
upcommons.citation.startingPage1
upcommons.citation.endingPage6


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