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Macroporous silicon: a versatile material for 3D structure fabrication

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10.1016/j.sna.2007.09.001
 
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hdl:2117/118024

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Todorov Trifonov, TrifonMés informacióMés informacióMés informació
Rodríguez Martínez, ÁngelMés informacióMés informacióMés informació
Marsal, L F
Pallares, J
Alcubilla González, RamónMés informacióMés informació
Document typeArticle
Defense date2008-02
Rights accessRestricted access - publisher's policy
All rights reserved. This work is protected by the corresponding intellectual and industrial property rights. Without prejudice to any existing legal exemptions, reproduction, distribution, public communication or transformation of this work are prohibited without permission of the copyright holder
Abstract
This work focuses on the fabrication of three-dimensional (3D) microstructures by electrochemical etching of n-type silicon. We exploit the possibility of modulating the pore diameter along the growing direction to produce quasi-3D structures which exhibit periodicity also in third dimension. The fabricated structures are further processed to convert them into truly 3D networks consisting of interconnected silicon veins embedded in air. In particular, we show how a variety of complex 3D networks can be obtained starting from a simple initial pore arrangement, e.g. square or hexagonal. These 3D structures can be easily fabricated with very high precision and uniformity on a large scale. They constitute ideal hosts for sensing applications as well as perfect molds for casting 3D structures of unusual materials.
CitationTrifonov, T., Rodriguez, A., Marsal, L., Pallares, J., Alcubilla, R. Macroporous silicon: a versatile material for 3D structure fabrication. "Sensors and actuators A. Physical", Febrer 2008, vol. 141, núm. 2, p. 662-669. 
URIhttp://hdl.handle.net/2117/118024
DOI10.1016/j.sna.2007.09.001
ISSN0924-4247
Publisher versionhttp://www.sciencedirect.com/science/article/pii/S092442470700670X
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  • MNT - Grup de Recerca en Micro i Nanotecnologies - Articles de revista [345]
  • Departament d'Enginyeria Electrònica - Articles de revista [1.531]
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