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dc.contributor.authorBhaskar, Umesh Kumar
dc.contributor.authorBanerjee, Nirupam
dc.contributor.authorAbdollahi Hosnijeh, Amir
dc.contributor.authorWang, Zhen
dc.contributor.authorScholm, Darrell G.
dc.contributor.authorRijnders, Guus
dc.contributor.authorCatalan, Gustau
dc.contributor.otherUniversitat Politècnica de Catalunya. Departament d'Enginyeria Civil i Ambiental
dc.identifier.citationBhaskar, U., Banerjee, N., Abdollahi, A., Wang, Z., Scholm, D. G., Rijnders, G., Catalan, G. A flexoelectric microelectromechanical system on silicon. "Nature nanotechnology", 2016, vol. 11, p. 263-266.
dc.description.abstractFlexoelectricity allows a dielectric material to polarize in response to a mechanical bending moment and, conversely, to bend in response to an electric field. Compared with piezoelectricity, flexoelectricity is a weak effect of little practical significance in bulk materials. However, the roles can be reversed at the nanoscale. Here, we demonstrate that flexoelectricity is a viable route to lead-free microelectromechanical and nanoelectromechanical systems. Specifically, we have fabricated a silicon-compatible thin-film cantilever actuator with a single flexoelectrically active layer of strontium titanate with a figure of merit (curvature divided by electric field) of 3.33 MV-1, comparable to that of state-of-the-art piezoelectric bimorph cantilevers.
dc.format.extent4 p.
dc.subjectÀrees temàtiques de la UPC::Matemàtiques i estadística::Matemàtica aplicada a les ciències
dc.subjectÀrees temàtiques de la UPC::Matemàtiques i estadística::Investigació operativa::Optimització
dc.subject.lcshAutomatic control
dc.subject.lcshOperations research
dc.titleA flexoelectric microelectromechanical system on silicon
dc.subject.lemacControl automàtic
dc.subject.lemacInvestigació operativa
dc.contributor.groupUniversitat Politècnica de Catalunya. LACÀN - Mètodes Numèrics en Ciències Aplicades i Enginyeria
dc.description.peerreviewedPeer Reviewed
dc.subject.amsClassificació AMS::70 Mechanics of particles and systems::70Q05 Control of mechanical systems
dc.subject.amsClassificació AMS::90 Operations research, mathematical programming::90B Operations research and management science
dc.rights.accessOpen Access
dc.description.versionPostprint (author's final draft)
local.citation.authorBhaskar, U.; Banerjee, N.; Abdollahi, A.; Wang, Z.; Scholm, D. G.; Rijnders, G.; Catalan, G.
local.citation.publicationNameNature nanotechnology

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