A flexoelectric microelectromechanical system on silicon
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Flexoelectricity allows a dielectric material to polarize in response to a mechanical bending moment and, conversely, to bend in response to an electric field. Compared with piezoelectricity, flexoelectricity is a weak effect of little practical significance in bulk materials. However, the roles can be reversed at the nanoscale. Here, we demonstrate that flexoelectricity is a viable route to lead-free microelectromechanical and nanoelectromechanical systems. Specifically, we have fabricated a silicon-compatible thin-film cantilever actuator with a single flexoelectrically active layer of strontium titanate with a figure of merit (curvature divided by electric field) of 3.33 MV-1, comparable to that of state-of-the-art piezoelectric bimorph cantilevers.
CitationBhaskar, U., Banerjee, N., Abdollahi, A., Wang, Z., Scholm, D. G., Rijnders, G., Catalan, G. A flexoelectric microelectromechanical system on silicon. "Nature nanotechnology", 2016, vol. 11, p. 263-266.