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dc.contributor.authorRuggeri, Massimiliano
dc.contributor.authorMassarotti, Giorgio Paolo
dc.contributor.authorCodina Macià, Esteban
dc.contributor.otherUniversitat Politècnica de Catalunya. Departament de Mecànica de Fluids
dc.identifier.citationRuggeri, M., Massarotti, G., Codina-Macia, E. New high sensitivity MEMS sensor for indirect pressure measurement. A: JFPS International Symposium on Fluid Power. "The 10th JFPS International Symposium on Fluid Power, Fukuoka 2017, Oct. 24-27, 2017". The Japan Fluid Power System Society, 2017, p. 2A13-1-2A13-6.
dc.description.abstractSensorization of modern electro-hydraulic systems is one of the key technologies for system observability and controllability. Increasing needs for closed loop controls, high precision, power control and energy monitoring, diagnosis and safety concerns, ask for both pressure and flow acquisition in industrial and mobile applications. Pressure sensors need specific coupling systems for mounting, and both pipes and components must be modified to install pressure sensors. Traditional pressure sensors are related to mini-mess and to oil flow modification in the sensor area. Direct pressure measurement is often made using thin film sensors whose measurement principle is related to a strain measurement. Modern Silicon based technologies offer new solutions for a less invasive pressure measurement. Micro Electro-Mechanical Systems (MEMS) Technology is suitable to design new sensors for indirect pressure measurement. This paper present a new MEMS resonant sensor, for low strain measurement that can be successfully used to indirectly measure oil pressure acquiring component’s strain measurement.
dc.publisherThe Japan Fluid Power System Society
dc.subjectÀrees temàtiques de la UPC::Enginyeria mecànica
dc.subject.lcshMicroelectromechanical systems
dc.subject.otherPressure measurement
dc.subject.otherDETF strain sensor
dc.subject.otherGear pump
dc.titleNew high sensitivity MEMS sensor for indirect pressure measurement
dc.typeConference report
dc.subject.lemacSistemes microelectromecànics
dc.subject.lemacPressió -- Mesurament
dc.contributor.groupUniversitat Politècnica de Catalunya. LMIT-CT - Laboratories of Mechanical Engineering Innovation and Technology
dc.rights.accessRestricted access - publisher's policy
dc.description.versionPostprint (published version)
local.citation.authorRuggeri, M.; Massarotti, G.; Codina-Macia, Esteban
local.citation.contributorJFPS International Symposium on Fluid Power
local.citation.publicationNameThe 10th JFPS International Symposium on Fluid Power, Fukuoka 2017, Oct. 24-27, 2017

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