New high sensitivity MEMS sensor for indirect pressure measurement

Abstract

Sensorization of modern electro-hydraulic systems is one of the key technologies for system observability and controllability. Increasing needs for closed loop controls, high precision, power control and energy monitoring, diagnosis and safety concerns, ask for both pressure and flow acquisition in industrial and mobile applications. Pressure sensors need specific coupling systems for mounting, and both pipes and components must be modified to install pressure sensors. Traditional pressure sensors are related to mini-mess and to oil flow modification in the sensor area. Direct pressure measurement is often made using thin film sensors whose measurement principle is related to a strain measurement. Modern Silicon based technologies offer new solutions for a less invasive pressure measurement. Micro Electro-Mechanical Systems (MEMS) Technology is suitable to design new sensors for indirect pressure measurement. This paper present a new MEMS resonant sensor, for low strain measurement that can be successfully used to indirectly measure oil pressure acquiring component’s strain measurement.