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Characterization of dynamics and power handling of RF MEMS using vector measurement techniques

dc.contributor.authorGirbau Sala, David
dc.contributor.authorLázaro Guillén, Antoni
dc.contributor.authorPradell i Cara, Lluís
dc.contributor.otherUniversitat Politècnica de Catalunya. Departament de Teoria del Senyal i Comunicacions
dc.date.accessioned2007-06-11T11:52:49Z
dc.date.available2007-06-11T11:52:49Z
dc.date.created2004
dc.date.issued2004-11-30
dc.identifier.citationGirbau, D.; Lázaro, A.; Pradell, L. Characterization of dynamics and power handling of RF MEMS using vector measurement techniques. IEEE Transactions on microwave theory and techniques, vol. 52, núm. 11, p. 2627-2633.
dc.identifier.issn0018-9480
dc.identifier.urihttp://hdl.handle.net/2117/1076
dc.description.abstractThis paper proposes a new method to measure dynamics and power handling of RF microelectromechanical systems (MEMS) devices based on a mobile membrane. The method uses in-phase/quadrature demodulation of an RF signal proportional to the reflection coefficient of the measured device, which contains information of its mechanical properties, such as actuation and release times and instantaneous position of the mobile membrane. Both one-port (capacitors) and two-port devices (switches and extended tuning-range capacitors) can be measured. Its main advantage is the capability of obtaining information from both magnitude and phase variations of the device reflection coefficient to characterize its dynamics and power handling. It is shown that detecting phase is advantageous in high quality factor capacitors, where the magnitude of the reflection coefficient is nearly constant for any position of the mobile membrane. Open-short-load calibration of the system is provided in order to obtain absolute measurements, which are necessary for power-handling characterization. The performances of the proposed method are demonstrated by comparison to systems based on detection of the magnitude of the reflection coefficient. A MEMS capacitor is characterized in terms of dynamics-actuation and release times, and mechanical resonance frequency and in terms of power handling-membrane instantaneous position and phase and tuning range variation.
dc.format.extent2627-2633
dc.language.isoeng
dc.publisherIEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
dc.subjectÀrees temàtiques de la UPC::Enginyeria de la telecomunicació::Radiocomunicació i exploració electromagnètica::Circuits de microones, radiofreqüència i ones mil·limètriques
dc.subject.lcshCapacitors
dc.subject.lcshDemodulation (Electronics)
dc.subject.lcshMicroelectromechanical systems
dc.subject.lcshRadio frequency
dc.subject.otherQ-factor
dc.subject.othercapacitors
dc.subject.otherdemodulation
dc.subject.othermicroswitches
dc.titleCharacterization of dynamics and power handling of RF MEMS using vector measurement techniques
dc.typeArticle
dc.subject.lemacCondensadors
dc.subject.lemacModulació (Electrònica)
dc.subject.lemacSistemes microelectromecànics
dc.contributor.groupUniversitat Politècnica de Catalunya. RF&MW - Grup de Recerca de sistemes, dispositius i materials de RF i microones
dc.description.peerreviewedPeer Reviewed
dc.rights.accessOpen Access


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