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Template fabrication of 3D metallic microstructures by electrochemical etching and electroplanting
dc.contributor.author | Hernández Díaz, David |
dc.contributor.author | Lange, Diego |
dc.contributor.author | Todorov Trifonov, Trifon |
dc.contributor.author | Garin Escriva, Moises |
dc.contributor.author | García Molina, Francisco Miguel |
dc.contributor.author | Rodríguez Martínez, Ángel |
dc.contributor.author | Alcubilla González, Ramón |
dc.contributor.other | Universitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica |
dc.date.accessioned | 2010-12-01T13:05:14Z |
dc.date.available | 2010-12-01T13:05:14Z |
dc.date.created | 2010 |
dc.date.issued | 2010 |
dc.identifier.citation | Hernandez, D. [et al.]. Template fabrication of 3D metallic microstructures by electrochemical etching and electroplanting. A: Encuentro Franco-Español de Química y Física del Estado Sólido. "VI Encuentro Franco-Español de Química y Física del Estado Sólido". Tarragona: 2010. |
dc.identifier.uri | http://hdl.handle.net/2117/10485 |
dc.description.abstract | In this work, we show that macroporous silicon consisting of periodic arrays of etched pores is a feasible alternative for synthesis of 2D and 3d metallic microstructures due to its flexibility in the definition of complex geometries bulk. In addition macroporous silicon features full three-dimensionality, well controlled pore distribution and growth, and scalable dimensions (0.5-100 μm). We present here the fabrication of 3D Ni micro-structures by electroplating of macroporous silicon templates. The given approach can be applied for depositions of different metals and in more complicated template-structures. |
dc.format.extent | 1 p. |
dc.language.iso | eng |
dc.subject | Àrees temàtiques de la UPC::Energies::Recursos energètics renovables |
dc.subject.lcsh | Nanotechnology -- Research |
dc.subject.lcsh | 3D metallic microstructures |
dc.title | Template fabrication of 3D metallic microstructures by electrochemical etching and electroplanting |
dc.type | Conference report |
dc.subject.lemac | Nanotecnologia -- Investigació |
dc.contributor.group | Universitat Politècnica de Catalunya. MNT - Grup de Recerca en Micro i Nanotecnologies |
dc.description.peerreviewed | Peer Reviewed |
dc.rights.access | Open Access |
local.identifier.drac | 4449690 |
dc.description.version | Postprint (published version) |
local.citation.author | Hernandez, D.; Lange, D.; Todorov, T.; Garin, M.; Garcia Molina, M.; Rodriguez, A.; Alcubilla, R. |
local.citation.contributor | Encuentro Franco-Español de Química y Física del Estado Sólido |
local.citation.pubplace | Tarragona |
local.citation.publicationName | VI Encuentro Franco-Español de Química y Física del Estado Sólido |